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Journal of the Chinese Institute of Industrial Engineers Volume 20, 2003 - Issue 6
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Original Articles

GENETIC ALGORITHM BASED SEMICONDUCTOR MANUFACTURING PROCESS CONTROLLER FOR CHEMICAL MECHANICAL PLANARIZATION

Jinn-Yi Yeh Department of Industrial Engineering, Da-Yeh University, 112, Shan-Jian Rd., Da-Tsuen, Changhua, Taiwan, R. O. C.
&
Bau-Hsien Huang Department of Industrial Engineering, Da-Yeh University, 112, Shan-Jian Rd., Da-Tsuen, Changhua, Taiwan, R. O. C.
Pages 625-635 | Received 01 Dec 2002, Accepted 01 Jun 2003, Published online: 15 Feb 2010

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Read on this site (2)

J.-T. Wong, C.-T. Su & H.-T. Hsieh. (2007) A framework for determining MIMO process parameters by a neuro-DM&ACO approach. International Journal of Production Research 45:15, pages 3505-3520.
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Chwen-Tzeng Su, Jui-Tsung Wong & Shang-Chun Tsou. (2005) A PROCESS PARAMETERS DETERMINATION MODEL BY INTEGRATING ARTIFICIAL NEURAL NETWORK AND ANT COLONY OPTIMIZATION. Journal of the Chinese Institute of Industrial Engineers 22:4, pages 346-354.
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Articles from other publishers (1)

Chwen-Tzeng Su & Jui-Tsung Wong. (2007) Designing MIMO controller by neuro-traveling particle swarm optimizer approach. Expert Systems with Applications 32:3, pages 848-855.
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