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Journal of the Chinese Institute of Industrial Engineers Volume 20, 2003 - Issue 6
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Original Articles

GENETIC ALGORITHM BASED SEMICONDUCTOR MANUFACTURING PROCESS CONTROLLER FOR CHEMICAL MECHANICAL PLANARIZATION

Jinn-Yi Yeh Department of Industrial Engineering, Da-Yeh University, 112, Shan-Jian Rd., Da-Tsuen, Changhua, Taiwan, R. O. C.
&
Bau-Hsien Huang Department of Industrial Engineering, Da-Yeh University, 112, Shan-Jian Rd., Da-Tsuen, Changhua, Taiwan, R. O. C.
Pages 625-635 | Received 01 Dec 2002, Accepted 01 Jun 2003, Published online: 15 Feb 2010

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