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Xiaoxing Zhang, Hanyan Xiao, Ju Tang, Zhaolun Cui & Ying Zhang. (2017) Recent advances in decomposition of the most potent greenhouse gas SF6. Critical Reviews in Environmental Science and Technology 47:18, pages 1763-1782.
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Ming Lee, Moo
Been Chang & Kuan
Yu Wu. (2004) Abatement of Sulfur Hexafluoride Emissions from the Semiconductor Manufacturing Process by Atmospheric-Pressure Plasmas. Journal of the Air & Waste Management Association 54:8, pages 960-970.
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Articles from other publishers (38)
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