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Integrated Ferroelectrics
An International Journal
Volume 33, 2001 - Issue 1-4
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Original Articles

Development of micromechanical and optical devices incorporating deposited PZT films

Robert V. Wright BAE SYSTEMS Infra-Red Ltd., Caswell, Towcester, Northants, NN12 8EQ., UK
,
Anil Patel BAE SYSTEMS Infra-Red Ltd., Caswell, Towcester, Northants, NN12 8EQ., UK
,
Michel Pealat SOPRA, Paris, France
,
Ralph Nonninger Institut Für Neue Materialien, Saarbrucken, Germany
,
Roger Diels Melexis, Tessenderlo, Belgium
,
Peter Enoksson Royal Institute of Technology, Stockholm, Sweden
,
Colin Fox University of Nottingham, Nottingham, UK
&
Paul Netter Corning S A, Fontainebleau, France
 show all
Pages 209-220 | Received 15 Mar 2000, Published online: 19 Aug 2006

Citations (2)

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Read on this site (1)

SIDNEYB. LANG. (2004) Guide to the Literature of Piezoelectricity and Pyroelectricity. 21. Ferroelectrics 300:1, pages 177-280.
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Articles from other publishers (1)

Wei-Hua Xu, Dexin Lu & Tong-Yi Zhang. (2001) Determination of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films with Raman spectroscopy. Applied Physics Letters 79:25, pages 4112-4114.
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