References
- Sayer , M. , Yi , G. and Sedlar , M. 1995 . Integrated. Ferroelectrics. , 7. : 247 – 258 .
- Shorrocks , N. M. , Patel , A. , Walker , M. J. and Parsons , A. D. 1995 . Microelect. Eng. , 29 : 59 – 66 .
- Shimomura , K. , Tsurumi , T. , Ohba , Y. and Daimon , M. 1991 . Jap. J. Appl. Phys. , 30 ( 9B ) : 2174 – 2177 .
- Ichinose , T. and Terada , J. 1995 . Sensors and Actuators. ,
- Hopkin , I. 1997 . Proc. DGON Symp. Gyro Technology., Stuttgart ,
- Harris , A. 1995 . Electr. Letts. , 31 ( 18 ) : 1567 – 68 .
- Kunz , K. , Enoksson , P. , Wright , R. and Stemme , G. to be published
- Barrow , D. A. 1995 . Mat. Res. Soc. Symp. Proc. , 360 : 103 – 108 .
- Stemme , G. 1996 . Tech. Dig. MEMS'96 479 – 484 . San Diego