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Integrated Ferroelectrics
An International Journal
Volume 66, 2004 - Issue 1
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Original Articles

The Modeling and Fabricating of Film Bulk Acoustic Resonators Using Sputtered PZT Films with Various Thickness

YOUNG PARK Catenary System Research Group Korea Railroad Research Institute, Uiwang-City, South Korea, 437-050
,
EUNG KWON Kim School of Electrical and Computer Engineering Sungkyunkwan University 300 Chunchun-dong, Suwon, South Korea, 440-746
,
TAE YONG LEE School of Electrical and Computer Engineering Sungkyunkwan University 300 Chunchun-dong, Suwon, South Korea, 440-746
&
JOON TAE SONG School of Electrical and Computer Engineering Sungkyunkwan University 300 Chunchun-dong, Suwon, South Korea, 440-746
Pages 187-194 | Received 01 May 2004, Accepted 01 May 2004, Published online: 12 Aug 2010

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WEI-WEI CHENG, SHU-RONG DONG, YAN HAN, HAI-FENG ZHOU, SHI-HENG ZHAO, HUI-JIN ZHANG & XIAO-XIA HAN. (2009) A LOW POWER, LOW PHASE NOISE FBAR OSCILLATOR. Integrated Ferroelectrics 105:1, pages 75-86.
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Articles from other publishers (4)

M. Kathiresan, C. Manikandan, S. Premkumar, E. Varadarajan, R. Ramesh, M. K. Jayaraj & T. Santhanakrishnan. (2022) Key issues and challenges in device level fabrication of MEMS acoustic sensors using piezo thin films doped with strontium and lanthanum. Journal of Materials Science: Materials in Electronics 33:14, pages 11271-11280.
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Andreas Noeth, Tomoaki Yamada, Vladimir Sherman, Paul Muralt, Alexander Tagantsev & Nava Setter. (2007) DC bias-dependent shift of the resonance frequencies in BST thin film membranes. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 54:12, pages 2487-2492.
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Andreas Noeth, Tomoaki Yamada, Vladimir O. Sherman, Paul Muralt, Alexander K. Tagantsev & Nava Setter. (2007) Tuning of direct current bias-induced resonances in micromachined Ba0.3Sr0.7TiO3 thin-film capacitors. Journal of Applied Physics 102:11.
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A. Noeth, T. Yamada, V. Sherman, P. Muralt, A. Tangantsev & N. Setter. (2007) DC bias dependent shift of resonance frequencies in BST thin film membranes. DC bias dependent shift of resonance frequencies in BST thin film membranes.

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