REFERENCES
- Huang , P. S. , Ren , T. L. , Lou , Q. W. , Liu , J. S. , Liu , L. T. and Li , Z. J. 2003 . Design of a triaxial piezoelectric accelerometer . Integr Ferroele. , 56 : 1115 – 1122 .
- Cho , C. R. , Francis , L. F. F. and Jang , M. S. 1999 . Piezoelectric properties and acoustic wave detection of Pb(Zr0.52Ti0.48)O3 thin films for microelectromechanical systems sensor . Jpn. J. Appl. Phys. , 38 : L751 – L754 . http://dx.doi.org/10.1143%2FJJAP.38.L751
- Hoffmann , M. , Leuerer , T. , Liedtke , R. , Böttger , U. , Mokwa , W. and Waser , R. 2002 . Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for mems applications . Integr Ferroele. , 50 : 21 – 32 . http://dx.doi.org/10.1080%2F10584580215526
- Cao , L. , Mantell , S. and Polla , D. 2001 . Design and simulation of an implantable medical drug delivery system using microelectromechanical system technology . Sensors and Actuators , 94 : 117 – 125 . http://dx.doi.org/10.1016%2FS0924-4247%2801%2900680-X
- Park , Y. , Jeong , K. W. and Song , J. T. 2002 . Effect of excess Pb on fagitue properties of PZT thin films prepared by rf-magnetron sputtering . Mater. Lett. , 56 : 481 – 485 .
- Kirby , P. B. , Potter , M. D. G. , Williams , C. P. and Lim , M. Y. 2003 . Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators . J. Eur. Ceram. Soc. , 23 : 2689 – 2692 . http://dx.doi.org/10.1016%2FS0955-2219%2803%2900147-X
- Schreiter , M. , Gabl , R. , Pitzer , D. , Primig , R. and Wersing , W. 2004 . Electro-acoustic hysteresis behavior of PZT thin film bulk acoustic resonators . J. Eur. Ceram. Soc. , 24 : 1589 – 1592 . http://dx.doi.org/10.1016%2FS0955-2219%2803%2900406-0
- Ren , T. L. , Liu , Y. X. , Liu , J. S. , Liu , L. T. and Li , Z. J. 2001 . PZT based bulk acoustic wave RF filters . IEEE Trans. , 1 : 726 – 729 .
- Pu , X. , Luo , W. , Ding , A. and Tian , H. Q. P. 2001 . Preparation of PZT thick films by one-step firing sol-gel process . MRS. Bulletin. , 36 : 1471 – 1478 .
- Lee , S. H. , Joo , H. J. , Jung , J. H. , Ryu , M. K. , Lee , S. S. and Jang , M. S. 1999 . Thickness dependence of electrical properties for PZT films . J Kor Phys Soc. , 35 : S1172 – S1175 .
- Wakabayashi , S. I. , Sakata , M. , Goto , H. , Takeuchi , M. and Yada , T. 1996 . Static characteristics of piezoelectric thin film buckling actuator . Jpn. J. Appl. Phys. , 35 : 5012 – 5014 . http://dx.doi.org/10.1143%2FJJAP.35.5012
- Park , Y. , Jeong , S. M. , Moon , S. I. , Jeong , K. W. , Kim , S. H. , Song , J. T. and Yi , J. 1999 . Pt and RuO2 bottom electrode effects on Pb(Zr,Ti)O3 Momory Capacitors . Jpn. J. Appl. Phys. , 38 : 6801 – 6806 . http://dx.doi.org/10.1143%2FJJAP.38.6801
- Park , Y. and Song , J. T. 2004 . Characteristics of Pb(Zr, Ti)O3 thin films deposited on Ru/RuO2 double layer . Mater. Lett. , 58 : 2128 – 2131 . http://dx.doi.org/10.1016%2Fj.matlet.2003.12.038
- Remiens , D. , Cattan , E. , Soyer , C. and Haccart , T. 2003 . Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and NB substitution . Materials Science in Semiconductor Processing. , 5 : 123 – 127 . http://dx.doi.org/10.1016%2FS1369-8001%2802%2900092-6
- Kim , D. H. , Yim , M. H. , Chai , D. K. and Yoon , G. W. 2003 . Improvements of resonance characteristics due to thermal annealing . Electronics Letters. , 39 : 962 – 964 . http://dx.doi.org/10.1049%2Fel%3A20030638