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Integrated Ferroelectrics
An International Journal
Volume 92, 2007 - Issue 1
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REGULAR PAPERS

DOUBLE-SIDED PZT FILMS ON PLATINIZED SI: FILM PREPARATION, STRUCTURAL AND PIEZOELECTRIC PROPERTIES

Jian Zhong Materials Science Program, Department of Electrical & Computer Engineering
,
Sushma Kotru Materials Science Program, Department of Electrical & Computer Engineering
,
Hui Han Department of Physics & Astronomy, The University of Alabama, Tuscaloosa, Alabama, 35487, USA
&
Raghvendra Kumar Pandey Materials Science Program, Department of Electrical & Computer Engineering
Pages 123-134 | Received 01 Jun 2007, Published online: 20 Sep 2010

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