DOUBLE-SIDED PZT FILMS ON PLATINIZED SI: FILM PREPARATION, STRUCTURAL AND PIEZOELECTRIC PROPERTIES

REFERENCES

• Trolier-McKinstry , S. and Muralt , P. 2004 . Thin Film Piezoelectrics for MEMS . J. Electroceramics , 12 : 7 – 17 .
   Web of Science ®Google Scholar
• Muralt , P. 2000 . PZT thin Films for Microsensors and Actuators: Where Do We Stand? . IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. , 47 : 903 – 915 .
   PubMed Web of Science ®Google Scholar
• Yazdi , N. , Ayazi , F. and Najafi , K. 1998 . Micromachined inertial sensors . Proceed. of the IEEE , 86 : 1640 – 1659 .
   Web of Science ®Google Scholar
• Maeda , R. , Tsaur , J. J. , Lee , S. H. and Ichiki , M. 2004 . Piezoelectric microactuator devices . J. Electroceramics , 12 : 89 – 100 .
   Web of Science ®Google Scholar
• Wang , L.-P. , Wolf , R. A. Jr. , Wang , Y. , Deng , K. K. , Zou , L. , Davis , R. J. and Trolier-McKinstry , S. 2003 . Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers . J. Microelectromech, Syst. , 12 : 433 – 439 .
   Web of Science ®Google Scholar
• Muralt , P. , Kohli , M. , Maeder , T. , Kholkin , A. , Brooks , K. , Setter , N. and Luthier , R. 1995 . Fabrication and characterization of PZT thin-film vibrators for micromotors . Sensors and Actuators A , 48 : 157 – 165 .
   Web of Science ®Google Scholar
• Luginbuhl , Ph. , Racine , G.-A. , Lerch , Ph. , Romanowiez , B. , Brooks , K. G. , de Rooij , N. F. , Renaud , Ph. and Setter , N. 1996 . Piezoelectric cantilever beams actuated by PZT sol-gel thin film . Sensors and Actuators A , 54 : 530 – 535 .
   Web of Science ®Google Scholar
• Miyahara , Y. , Fujii , T. , Watanabe , S. , Tonoli , A. , Carabelli , S. , Yamada , H. and Bleuler , H. 1999 . Lead zirconate titanate cantilever for noncontact atomic force microscopy . Appl. Surf. Sci. , 140 : 428 – 431 .
   Web of Science ®Google Scholar
• Koch , M. , Harris , N. , Mass , R. , Evans , A. G. R. , White , N. M. and Brunnschweiler , A. 1997 . A novel micropump design with thick-film piezoelectric actuator . Measurement Science and Techn. , 8 : 49 – 57 .
   Web of Science ®Google Scholar
• Cross , S. J. , Tadigadapa , S. , Jackson , T. N. , Trolier-McKinstry , S. and Zhang , Q. Q. 2003 . Lead-zirconate-titanate-based piezoelectric micromachined switch . Appl. Phys. Lett. , 83 : 174 – 176 .
   Web of Science ®Google Scholar
• Morten , B. , De Cicco , G. and Prudenziati , M. 1992 . Resonant pressure sensor based on piezoelectric properties of ferroelectric thick film . Sensors and Actuators A , 31 : 153 – 158 .
   Web of Science ®Google Scholar
• Titterton , D. H. and Weston , J. L. 2004 . Strapdown Inertial Navigation Technology, the Institute of Electrical Engineers, UK, , 2nd edn. 193 – 202 .
   Google Scholar
• 2000 . Kenji Uchino, Ferroelectric Devices , 160 Marcel Dekker .
   Google Scholar
• Voss , R. , Bauer , K. , Ficker , W. , Gleissner , T. , Kupke , W. , Rose , M. , Sassen , S. , Schalk , J. , Seidel , H. and Stenzel , E. “Silicon angular rate sensor for automotive applications with piezoelectric drive and piezoresistive read-out,” . Tech. Dig. 9th Int. Conf. Solid-State Sensors and Actuators (Transducers1997) . Chicago , IL , USA. pp. 879 – 882 .
   Google Scholar
• Royle , C. M. and Fox , C. H. J. 2001 . “The mechanics of an oscillatory rate gyroscope with piezoelectric film actuation and sensing,” . Proc. Instn. Mech. Engrs. , 215 : 1211 – 1221 . part C
   Web of Science ®Google Scholar
• Kwok , K. W. , Tsang , R. C. W. , Chan , H. L. W. and Choy , C. L. 2004 . Effect of niobium doping on the piezoelectric properties of sol-gel-derived lead-zirconate-titanate films . J. Appl. Phys. , 95 : 1372 – 1376 .
   Web of Science ®Google Scholar
• Haccart , T. , Cattan , E. , Remiens , D. , Hiboux , S. and Muralt , P. 2000 . “Evaluation of niobium effects on the longitudinal piezoelectric coefficients of Pb(Zr, Ti)O3 thin films,” . Appl. Phys. Lett. , 76 : 3292 – 3294 .
   Web of Science ®Google Scholar
• Budd , K. D. , Dey , S. K. and Payne , D. A. 1985 . “Sol-gel processing of PbTiO3, PbZrO3, PZT, and PLZT thin films,” . Br. Ceram. Proc. , 36 : 107 – 121 .
   Google Scholar
• Schwartz , R. W. , Boyle , T. J. , Lockwood , S. J. , Sinclair , M. B. , Dimos , D. and Buchheit , C. D. 1995 . Sol-gel processing of PZT thin films: a review of the state-of-the-art and process optimization strategies . Integr. Ferroelectr. , 7 : 259 – 277 .
   Web of Science ®Google Scholar
• Dubois , M.-A. and Muralt , P. 1999 . “Measurment of the effective transverse piezoelectric coefficient e 31,f of AlN and Pb(Zrx, Ti1 −x)O3 thin films,” . Sensors and Actuators , 77 : 106 – 112 .
   Web of Science ®Google Scholar
• Chen , S.-Y. and Chen , I.-W. 1998 . Texture development, microstructure evolution, and crystallization of chemically derived PZT thin films . J. Am. Ceram. Soc. , 81 : 97 – 105 .
   Web of Science ®Google Scholar
• Ledermann , N. , Muralt , P. , Baborowski , J. , Gentil , S. , Mukati , K. , Cantoni , M. , Seifert , A. and Setter , N. 2003 . {100}-textured, piezoelectric Pb(Zrx, Ti1 −x) O3 thin films for MEMS: integration, deposition and properties . Sensors and Actuators A , 105 : 162 – 170 .
   Web of Science ®Google Scholar