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Integrated Ferroelectrics
An International Journal
Volume 4, 1994 - Issue 2
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Original Articles

Preparation and properties of sol-gel derived PZT thin films for decoupling capacitor applications

R. W. Schwartz Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185, U.S.A.; Advanced Materials Laboratory, 1001 University Blvd., SE Suite 100, Albuquerque, NM, 87106, U.S.A.
,
D. Dimos Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185, U.S.A.
,
S. J. Lockwood Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185, U.S.A.
&
V. M. Torres Sandia National Laboratories, P.O. Box 5800, Albuquerque, NM, 87185, U.S.A.
Pages 165-174 | Received 01 Sep 1993, Published online: 19 Aug 2006

Citations (13)

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Read on this site (4)

Q. Zhang, Z. Huang, M.E. Vickers & R.W. Whatmore. (1999) The influence of particle size of acetic acid modified PZT precursor solution on the crystallization and electrical properties of sol-gel processed PZT thin films. Integrated Ferroelectrics 23:1-4, pages 215-228.
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R. Beanland, A. Patel & D. Hart. (1996) Observations of sol-gel deposited lead zirconium titanate films using transmission electron microscopy and X-ray diffraction. Integrated Ferroelectrics 13:4, pages 179-194.
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J.F. Scott. (1996) Device physics of ferroelectric memories. Ferroelectrics 183:1, pages 51-63.
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RobertW. Schwartz, TimothyJ. Boyle, StevenJ. Lockwood, MichaelB. Sinclair, Duane Dimos & CatherineD. Buchheit. (1995) Sol-gel processing of PZT thin films: A review of the state-of-the-art and process optimization strategies. Integrated Ferroelectrics 7:1-4, pages 259-277.
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Articles from other publishers (9)

L. Eric CrossS. Trolier-Mckinstry. 2003. digital Encyclopedia of Applied Physics. digital Encyclopedia of Applied Physics.
Q Zhang, Z Huang, M.E Vickers & R.W Whatmore. (1999) Effect of the particle size in PZT precursor sols on the orientation of the thin films. Journal of the European Ceramic Society 19:6-7, pages 1417-1421.
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K. S Brinkman, R. W. Schwartz, R. K Marcus & A. Anfone. (2011) Depth Profiling of Solution-Deposited Lead Zirconate Titanate Thin Films by Radio Frequency Glow Discharge Atomic Emission Spectroscopy (RF-GDAES). MRS Proceedings 596.
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D. DimosC. H. Mueller. (1998) PEROVSKITE THIN FILMS FOR HIGH-FREQUENCY CAPACITOR APPLICATIONS. Annual Review of Materials Science 28:1, pages 397-419.
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F. Fukumaru, S. Nagakari, S. Konushi, H. Nishikawa, K. Kamigaki & S. Nambu. (2011) PMN Based Thin Film Capacitor for Decoupling Applications in High Speed Digital Circuits. MRS Proceedings 541.
Crossref
D. Dimos, S.J. Lockwood, T.J. Garino, H.N. Al-Shareef & R.W. Schwartz. (2011) Integrated Decoupling Capacitors using Pb(Zr,Ti)O 3 Thin Films . MRS Proceedings 433.
Crossref
D. Dimos, S.J. Lockwood, R.W. Schwartz & M.S. Rodgers. (1995) Thin-film decoupling capacitors for multichip modules. IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A 18:1, pages 174-179.
Crossref
Dunne Dimos, Robert W. Schwartz & Steven J. Lockwood. (1994) Control of Leakage Resistance in Pb(Zr,Ti)O3 Thin Films by Donor Doping. Journal of the American Ceramic Society 77:11, pages 3000-3005.
Crossref
D. Dimos, S.J. Lockwood, R.W. Schwartz & M.S. Rodgers. (1994) Thin-film decoupling capacitors for multi-chip modules. Thin-film decoupling capacitors for multi-chip modules.

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