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Integrated Ferroelectrics
An International Journal
Volume 6, 1995 - Issue 1-4
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Original Articles

A thin film pyroelectric detector

A. Bell Laboratoire de Céramique, EPFL, 1015, Lausanne, Switzerland
,
Y. Huang Laboratoire de Céramique, EPFL, 1015, Lausanne, Switzerland
,
O. Paul Physical Electronics Laboratory, ETH Zurich, Switzerland
,
Y. Nemirovsky Department of Electronic Engineering, Technion, Haifa, Israel
&
N. Setter Laboratoire de Céramique, EPFL, 1015, Lausanne, Switzerland
Pages 231-240 | Received 15 Mar 1994, Published online: 19 Aug 2006

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P. Ramos, A. de Andres & A. López. (2007) EFFECT OF THERMAL LOSSES ON THE SPECIFIC DETECTIVITY OF PYROELECTRIC INFRARED DETECTORS. Integrated Ferroelectrics 92:1, pages 147-159.
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B. Willing, P. Muralt, N. Setter & O. Oehlero. (1999) Gas spectrometry based on a pyroelectric thin film array. Ferroelectrics 225:1, pages 1-7.
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J. Kulek, J.L. Chartier, R. Le Bihan, L.M. Hafid & B. Hilczer. (1997) Pyroelectric response and thermally stimulated current of PZT-thin films. Ferroelectrics Letters Section 22:3-4, pages 83-88.
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J.F. Scott. (1996) Device physics of ferroelectric memories. Ferroelectrics 183:1, pages 51-63.
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Articles from other publishers (20)

Haitao Huang. 2018. Ferroelectric Materials for Energy Applications. Ferroelectric Materials for Energy Applications 349 361 .
Xinyu Li, Sheng-Guo Lu, Xiang-Zhong Chen, Haiming Gu, Xiao-shi Qian & Q. M. Zhang. (2013) Pyroelectric and electrocaloric materials. J. Mater. Chem. C 1:1, pages 23-37.
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P. Muralt. 2005. Electroceramic-Based MEMS. Electroceramic-Based MEMS 81 113 .
Lingling Sun, Ooi Kiang Tan, Weiguo Liu, Weiguang Zhu & Xiaofeng Chen. (2004) Characterization of sol–gel derived Pb(Zr0.3Ti0.7)O3/PbTiO3 multilayer thin films. Ceramics International 30:7, pages 1835-1841.
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L.L. Sun, O.K. Tan, W.G. Liu, X.F. Chen & W. Zhu. (2003) Comparison study on sol–gel Pb(Zr0.3Ti0.7)O3 and Pb(Zr0.3Ti0.7)O3/PbTiO3 multilayer thin films for pyroelectric infrared detectors. Microelectronic Engineering 66:1-4, pages 738-744.
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Paul Muralt. (2001) Micromachined infrared detectors based on pyroelectric thin films. Reports on Progress in Physics 64:10, pages 1339-1388.
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Ling Ling Sun, Wei Guo Liu, Ooi Kiang Tan & Wei Guang Zhu. (2011) Micro-machined Pyroelectric Infrared Detector Based on Sol-gel Derived Pb(Zr 0.3T i 0.7 )O 3 /PbTiO 3 Multilayer Thin Films . MRS Proceedings 688.
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Sidney B. Lang & Dilip K. Das-Gupta. 2001. Handbook of Advanced Electronic and Photonic Materials and Devices. Handbook of Advanced Electronic and Photonic Materials and Devices 1 55 .
P. Muralt. (2000) PZT thin films for microsensors and actuators: Where do we stand?. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 47:4, pages 903-915.
Crossref
P Muralt. (2000) Ferroelectric thin films for micro-sensors and actuators: a review. Journal of Micromechanics and Microengineering 10:2, pages 136-146.
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G. Suchaneck, R. Koehler, P. Padmini, T. Sandner, J. Frey & G. Gerlach. (1999) Self-polarization control of radio-frequency-sputtered lead zirconate titanate films. Surface and Coatings Technology 116-119, pages 1238-1243.
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B. Willing, M. Kohli, P. Muralt & O. Oehler. (1998) Thin film pyroelectric array as a detector for an infrared gas spectrometer. Infrared Physics & Technology 39:7, pages 443-449.
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V.B. Samoilov & Yung Sup Yoon. (1998) Frequency response of multilayer pyroelectric sensors. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 45:5, pages 1246-1254.
Crossref
B. Willing, M. Kohli, P. Muralt, N. Setter & O. Oehler. (1998) Gas spectrometry based on pyroelectric thin-film arrays integrated on silicon. Sensors and Actuators A: Physical 66:1-3, pages 109-113.
Crossref
Dong Hoon Chang, Seong Jun Kang & Yung Sup Yoon. (1998) Response of thin film pyroelectric sensors. Response of thin film pyroelectric sensors.
G. Suchaneck, T. Sandner, R. Kohler, P. Padmini, G. Gerlach, V.P. Afanasjev & E.A. Tarakanov. (1998) The spatial distribution of polarization and space charge in sputtered PZT thin films. The spatial distribution of polarization and space charge in sputtered PZT thin films.
Vladimir B. Samoilov, Seong Jun Kang, Dong Hoon Chang & Yung Sup Yoon. (2011) A Study on the Responsivity of Four-Layer Pyroelectric Sensors. MRS Proceedings 493.
Crossref
B. Willing, M. Kohli, P. Muralt, N. Setter & O. Oehler. (1997) Gas spectrometry based on pyroelectric thin film arrays integrated on silicon. Gas spectrometry based on pyroelectric thin film arrays integrated on silicon.
K.G. Brooks, M. Kohli, D.V. Taylor, T. Maeder, I. Reaney, A. Kholkin, P. Muralt & N. Setter. (1996) Sol-gel deposition of PZT thin films on ceramic ZrO/sub 2/ substrates. Sol-gel deposition of PZT thin films on ceramic ZrO/sub 2/ substrates.
M. Klee, U. Mackens, J. Pankert, W. Brand & W. Klee. 1995. Science and Technology of Electroceramic Thin Films. Science and Technology of Electroceramic Thin Films 99 115 .

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