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Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
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Session IV: Thin films

Preparation of BST thin films on Pt electrode on Si wafer with down-flow LSMCVD reactor

Hyun Jin Chung Department of Chemical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea
,
Jin Hong Kim Department of Chemical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea
,
Won Seok Moon Department of Chemical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea
,
Seung Bin Park Department of Chemical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea
,
Cheol Seong Hwang Semiconductor R and D center, Samsung electronics Co., Ltd., San #24 Nongseo-lee, Kiheung-eup, Yongin-gun, Kyungki-do, 449-900, Korea
,
Moon Yong Lee Semiconductor R and D center, Samsung electronics Co., Ltd., San #24 Nongseo-lee, Kiheung-eup, Yongin-gun, Kyungki-do, 449-900, Korea
&
Seong Ihl Woo Department of Chemical Engineering, Korea Advanced Institute of Science and Technology, 373-1 Kusong-Dong, Yusong-Gu, Taejon, 305-701, Korea
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Pages 185-197 | Received 27 May 1996, Published online: 19 Aug 2006

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Shan Lianwei, Li Wei, Xu Huanyan, Han Zhidong, Wu Ze, Dong Limin, Fu Xinghua & Hou Wenping. (2014) The Dielectric Properties for Yttrium Doped SBT Thin Films Prepared by Sol-Gel Method. Integrated Ferroelectrics 151:1, pages 14-20.
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O.K. Tan, X.F. Chen & W.G. Zhu. (1999) Ferroelectric (Ba, Sr)TiO3 thin films for H2 gas detection by sol-gel and RF sputtering. Ferroelectrics 225:1, pages 295-302.
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Articles from other publishers (7)

Ki Woong Kim, Min Ku Jeon, Kwang Seok Oh, Tai Suk Kim, Yun Seok Kim & Seong Ihl Woo. (2007) Combinatorial approach for ferroelectric material libraries prepared by liquid source misted chemical deposition method. Proceedings of the National Academy of Sciences 104:4, pages 1134-1139.
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Hyun Jin Chung, Suk Jin Chung, Min Ku Jeon & Seong Ihl Woo. (2006) Electrical properties of (Bi3.5La0.5)Ti3O12 thin-films prepared by liquid source misted chemical deposition. Korean Journal of Chemical Engineering 23:2, pages 329-332.
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Shuchen Hsieh, David Beck, Taketoshi Matsumoto & Bruce E. Koel. (2004) Thermal stability of ultrathin titanium films on a Pt(111) substrate. Thin Solid Films 466:1-2, pages 123-127.
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Hyun Jin Chung, Jin Hong Kim & Seong Ihl Woo. (2001) (Pb,Sr)TiO 3 Thin Films for a ULSI DRAM Capacitor Prepared by Liquid Source Misted Chemical Deposition . Chemistry of Materials 13:5, pages 1441-1443.
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Hyun Jin Chung, Jae Hyoung Choi, Jeong Yong Lee & Seong Ihl Woo. (2001) Preparation and electrical properties of (Ba,Sr)TiO3 thin films deposited by liquid source misted chemical deposition. Thin Solid Films 382:1-2, pages 106-112.
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H. J. Chung & S. I. Woo. (2001) Electrical characteristics of (Pb,Sr)TiO3 thin films for ultra-large-scale-integrated dynamic random access memory capacitors prepared by liquid-source misted chemical deposition. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena 19:1, pages 275-280.
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Won Seok Moon, Seong Ihl Woo & Seung Bin Park. (2000) Preparation and characterization of lead zirconate titanate thin films by liquid source misted chemical deposition. Thin Solid Films 359:1, pages 77-81.
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