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Integrated Ferroelectrics
An International Journal
Volume 17, 1997 - Issue 1-4
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Piezoelectric and mems applications

Piezoelectric thin films for mems

Pages 297-307 | Published online: 19 Aug 2006

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M. Hasheminiasari & J. Lin. (2016) Seed layer effect on the (0 0 2) texture and piezoelectric properties of pulsed-DC sputtered AlN thin films. Advances in Materials and Processing Technologies 2:1, pages 66-72.
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M Çopuroğlu, S O’Brien, B Malič, B Kužnik, M Kosec, X H Zhu, E Defaÿ, H Doyle & R Winfield. (2011) Evaluation of process parameters and nanoparticle seeding of sol–gel derived lead–magnesium–niobium titanate thin films. Advances in Applied Ceramics 110:8, pages 490-495.
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I.Y. (Steve) Shen, G.Z. Cao, Chia-Che Wu & Cheng-Chun Lee. (2006) PZT Thin-Film Meso- and Micro Devices. Ferroelectrics 342:1, pages 15-34.
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Y. Wang, Y. L. Cheng, W. L. Liu, T. Y. Lam, Z. T. Song, S. L. Feng, H. L. W. Chan & C. L. Choy. (2005) Ferroelectric and Piezoelectric Properties of Pb(Zr,Ti)O3 Thin Films Integrated on SOI Wafers. Integrated Ferroelectrics 69:1, pages 223-229.
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T. Haccart, E. Cattan, D. Remiens, S. Hiboux & P. Muralt. (2001) Ferroelectric and piezoelectric properties of Nb doped PZT films. Integrated Ferroelectrics 35:1-4, pages 239-248.
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Andreas Seifert, Nicolas Ledermann, Stephane Hiboux, Jacek Baborowski, Paul Muralt & Nava Setter. (2001) Processing optimization of solution derived PbZr1−xTixO3 thin films for piezoelectric applications. Integrated Ferroelectrics 35:1-4, pages 159-166.
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RaananA. Miller & JonathanJ. Bernstein. (2000) A novel wet etch for patterning lead zirconate-titanate (PZT) thin-films. Integrated Ferroelectrics 29:3-4, pages 225-231.
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Marc-Alexandre Dubois, Paul Muralt & Laurent Sagalowicz. (1999) Aluminum nitride thin films for high frequency applications. Ferroelectrics 224:1, pages 243-250.
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Paul Muralt, Marc-Alexandre Dubois, Andreas Seifert, DavidV. Taylor, Nicolas Ledermann & Stephane Hiboux. (1999) In-plane piezoelectric coefficient of PZT thin films as a function of composition. Ferroelectrics 224:1, pages 235-242.
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Marc-Alexandre Dubois, Paul Muralt, DavidV. Taylor & Stephane Hiboux. (1998) Which PZT thin films for piezoelectric microactuator applications?. Integrated Ferroelectrics 22:1-4, pages 535-543.
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Andrea Mazzalai & Bernd Heinz. (2018) The Dielectric Loss of Wurtzite Al<inf>1-X</inf>Sc<inf>x</inf>N Thin Films for Mass Production of Piezoelectric MEMS. The Dielectric Loss of Wurtzite Al<inf>1-X</inf>Sc<inf>x</inf>N Thin Films for Mass Production of Piezoelectric MEMS.
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H. Bishara & S. Berger. (2017) Piezoelectric ultra-sensitive aluminum nitride thin film on flexible aluminum substrate. Journal of Materials Science 53:2, pages 1246-1255.
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Joontaek Jung, Wonjun Lee, Woojin Kang, Eunjung Shin, Jungho Ryu & Hongsoo Choi. (2017) Review of piezoelectric micromachined ultrasonic transducers and their applications. Journal of Micromechanics and Microengineering 27:11, pages 113001.
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Paul Muralt. (2017) Which is the best thin film piezoelectric material?. Which is the best thin film piezoelectric material?.
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Mahmoud Hadad, Husnain Ashraf, Gaurav Mohanty, Cosmin Sandu & Paul Muralt. (2016) Key-features in processing and microstructure for achieving giant electrostriction in gadolinium doped ceria thin films. Acta Materialia 118, pages 1-7.
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Paul Muralt. 2013. Chemical Solution Deposition of Functional Oxide Thin Films. Chemical Solution Deposition of Functional Oxide Thin Films 593 620 .
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P. Muralt, N. Ledermann, J. Paborowski, A. Barzegar, S. Gentil, B. Belgacem, S. Petitgrand, A. Bosseboeuf & N. Setter. (2005) Piezoelectric micromachined ultrasonic transducers based on PZT thin films. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control 52:12, pages 2276-2288.
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