Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 14, 1997 - Issue 1-4
10
Views
3
CrossRef citations to date
0
Altmetric
Materials processing - PVD

High reliable lead-zirconate-titanate growth using reactive sputtering and rapid thermal annealing

&
Pages 159-166 | Received 18 Mar 1996, Published online: 19 Aug 2006

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (1)

Q.X. Jia, J.M. Roper, P.N. Arendt, S.R. Foltyn, Y. Fan & J.R. Groves. (1998) Oriented conductive oxide electrodes on SiO2/Si. Integrated Ferroelectrics 21:1-4, pages 397-406.
Read now

Articles from other publishers (2)

R. Thapliyal, P. Schwaller, M. Amberg, F.J. Haug, G. Fortunato, D. Hegemann, H.J. Hug & A. Fischer. (2005) PZT thin film deposition on Si wafers and optical fibers prepared by reactive DC pulsed magnetron sputtering from a single metallic target. Surface and Coatings Technology 200:1-4, pages 1051-1056.
Crossref
Q. X. Jia, P. Arendt, J. R. Groves, Y. Fan, J. M. Roper & S. R. Foltyn. (2011) Role of Yttria-stabilized Zirconia Produced by Ion-beam-assisted Deposition on the Properties of RuO 2 on SiO 2 /Si . Journal of Materials Research 13:9, pages 2461-2464.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.