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Integrated Ferroelectrics
An International Journal
Volume 21, 1998 - Issue 1-4
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Session 1. Device Integration Issues

Degradation-free ferroelectric Pb(Zr, Ti)O3 thin film capacitors with IrO2 top electrode

Yoshihisa Fujisaki Central Research Laboratory, Hitachi Ltd., P.O. Box 2, Kokubunji, Tokyo, 185, Japan
,
Keiko Kushida-Abdelghafar Central Research Laboratory, Hitachi Ltd., P.O. Box 2, Kokubunji, Tokyo, 185, Japan
,
Hiroshi Miki Central Research Laboratory, Hitachi Ltd., P.O. Box 2, Kokubunji, Tokyo, 185, Japan
&
Yasuhiro Shimamoto Central Research Laboratory, Hitachi Ltd., P.O. Box 2, Kokubunji, Tokyo, 185, Japan
Pages 83-95 | Received 04 Mar 1998, Accepted 04 May 1998, Published online: 19 Aug 2006

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G. Suchaneck, R. Koehler, T. Sandner, G. Gerlach, A. Deineka, L. Jastrabik, A.I. Kosarev & A.N. Andronov. (2001) Polarization profile of RF-sputtered self-polarized PZT thin films. Integrated Ferroelectrics 32:1-4, pages 169-177.
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G. Suchaneck, Th. Sandner, R. Kohler & G. Gerlach. (1999) Investigation of the spatial polarization distribution of sputtered PZT thin films using limm. Integrated Ferroelectrics 27:1-4, pages 127-136.
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Articles from other publishers (6)

Kenji Nomura, Wensheng Wang, Ko Nakamura, Takashi Eshita, Kazuaki Takai, Soichiro Ozawa, Hideshi Yamaguchi, Satoru Mihara, Yukinobu Hikosaka, Hitoshi Saito, Yuji Kataoka & Manabu Kojima. (2019) Reconstruction of IrO2/(Pb, La)(Zr, Ti)O3 (PLZT) interface by optimization of postdeposition annealing and sputtering conditions. Journal of Applied Physics 126:7.
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Robert J Ferris, Shihong Lin, Mathieu Therezien, Benjamin B. Yellen & Stefan Zauscher. (2013) Electric Double Layer Formed by Polarized Ferroelectric Thin Films. ACS Applied Materials & Interfaces 5:7, pages 2610-2617.
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Soon-Gil Yoon & A. I. Kingon. (2001) Recovery Characteristics of Hydrogen-Damaged  ( Pb , La )  ( Zr , Ti )  O  3 Capacitors with Pt and IrO 2 Top Electrodes . Journal of The Electrochemical Society 148:7, pages F137-F139.
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Soon-Gil Yoon, Dwi Wicaksana, Dong-Joo Kim, Seung-Hyun Kim & A. I. Kingon. (2011) Effect of hydrogen on true leakage current characteristics of (Pb,La)(Zr,Ti)O 3 thin-film capacitors with Pt- or Ir-based top electrodes . Journal of Materials Research 16:4, pages 1185-1189.
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Soon-Gil Yoon, D. Wicaksana, Dong-Joo Kim, Seung-Hyun Kim & A.I. Kingon. (2001) Effect of hydrogen on (Pb,La)(Zr,Ti)O/sub 3/ (PLZT) thin film capacitors with Pt or Ir-based top electrodes. Effect of hydrogen on (Pb,La)(Zr,Ti)O/sub 3/ (PLZT) thin film capacitors with Pt or Ir-based top electrodes.
Deborah J. Taylor. 2001. Frontiers of Thin Film Technology. Frontiers of Thin Film Technology 435 463 .

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