Degradation-free ferroelectric Pb(Zr, Ti)O₃ thin film capacitors with IrO₂ top electrode

References

• Tanabe , N. , Matsuki , T. , Saitoh , S. , Takeuchi , T. , Kobayashi , S. , Nakajima , T. , Maejima , Y. , Hayashi , Y. , Amanuma , K. , Hase , T. , Miyasaka , Y. and Kunio , T. 1995 . 1995 Symp. on VLSI Tech. Digest of Tech. Papers , : 123
   Google Scholar
• Koike , H. 1996 . 1996 ISSCC Tech. Digest , : 368
   Google Scholar
• Onishi , S. 1994 . 1994 IEDM Tech. Digest , : 843
   Google Scholar
• Torii , K. , Kawakami , H. , Miki , H. , Kushida , K. , Itoga , M. , Goto , Y. , Kumihashi , T. , Yokoyama , N. , Moniwa , M. , Shoji , K. , Kaga , T. and Fujisaki , Y. 1996 . Proc. 8th Intern. Symp. Integ. Ferroelectrics , 16 : 21
   Web of Science ®Google Scholar
• Shoji , K. , Moniwa , M. , Yamashita , H. , Kisu , T. , Kaga , T. , Torii , K. , Kumihashi , T. , Morimoto , T. , Kawakami , H. , Gotoh , Y. , Itoga , T. , Yokoyama , N. , Kure , T. , Ohkura , M. , Fujisaki , Y. , Sakata , K. and Kimura , K. 1996 . 1996 Symp. on VLSI Tech. Digest of Tech. Papers , : 28
   Google Scholar
• Khamankar , R. , Kim , J. , Jiang , B. , Sudhama , C. , Maniar , P. , Moazzami , R. , Jones , R. and Lee , J. 1994 . Techn. Digest of IEDM. IEEE , 12 : 337
   Google Scholar
• Kushida-Abdelghafar , K. , Miki , H. , Torii , K. and Fujisaki , Y. 1996 . Appl. Phys. Lett. , 69 : 3188
   Web of Science ®Google Scholar
• Fujisaki , Y. , Kushida-Abdelghafar , K. , Shimamoto , Y. and Miki , H. 1997 . J. Appl. Phys. , 82 : 341
   Web of Science ®Google Scholar
• Dimos , D. , Warren , W. L. , Sinclair , M. B. , Tuttle , B. A. and Schwartz , R. W. 1994 . J. Appl. Phys. , 76 : 4305
   Web of Science ®Google Scholar
• Gillespie , W. D. , Herz , R. K. , Peterson , E. E. and Somorjai , G. A. 1981 . J. Catal. , 70 : 147
   Web of Science ®Google Scholar
• Christmann , K. , Ertl , G. and Pignet , T. 1976 . Surf. Sci. , 54 : 365
   Web of Science ®Google Scholar
• Barr , T. L. 1978 . J. Phys. Chem. , 82 : 1801
   Web of Science ®Google Scholar
• Nakatsuji , H. , Matsuzaki , Y. and Yonezawa , T. 1988 . J. Chem. Phys. , 88 : 5759
   Web of Science ®Google Scholar
• Miki , H. , Kushida-Abdelghafar , K. , Torii , K. and Fujisaki , Y. 1997 . Jpn. J. Appl. Phys. , 36 : 1132
   Web of Science ®Google Scholar
• Shimamoto , Y. , Kushida-Abdelghafar , K. , Miki , H. and Fujisaki , Y. 1997 . Appl. Phys. Lett. , 70 : 3096
   Web of Science ®Google Scholar
• Briggs , D. and Seah , M. P. 1983 . Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy , Sussex : John Wiley & Sons Ltd. .
   Google Scholar
• Kim , K. S. , Winograd , N. and Davis , R. E. 1971 . J. Am. Chem. Soc. , 93 : 6296
   Web of Science ®Google Scholar
• Takata , K. , Miki , H. , Kushida-Abdelghafar , K. , Torii , K. and Fujisaki , Y. 1998 . Appl. Phys. A , 66 to be published
   Google Scholar
• Takatani , S. , Kushida-Abdelghafar , K. and Miki , H. 1997 . Jpn. J. Appl. Phys. , 36 : L453
   Web of Science ®Google Scholar