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Integrated Ferroelectrics
An International Journal
Volume 22, 1998 - Issue 1-4
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Session 6. Materials processing – chemical solution process

Crystallographic orientation control for ferroelectric SBT and SBTN thin films from photosensitive mod solutions

Shan Sun Ramtron International Corporation, Colorado Springs, CO, 80921, USA
,
John Belsick Ramtron International Corporation, Colorado Springs, CO, 80921, USA
,
Hiroto Uchida Mitsubishi Materials Corporation, Central Research Institute, Kitabukuro-cho Omiya, Saitama, Japan; Symetrix Corporation, Colorado Springs, CO, 80918, USA
&
Tsutomu Atsuki Symetrix Corporation, Colorado Springs, CO, 80918, USA
Pages 55-63 | Received 04 Apr 1998, Published online: 19 Aug 2006

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Shan Sun, GlenR. Fox & Fan Chu. (2001) Comparison of sputtered SBTN and PLZT thin film capacitors for FRAM applications. Integrated Ferroelectrics 39:1-4, pages 109-118.
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Shan Sun, GlenR. Fox & T. Domokos Hadnagy. (1999) SBTN thin film capacitors prepared by RF-magnetron sputtering. Integrated Ferroelectrics 26:1-4, pages 31-37.
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