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Integrated Ferroelectrics
An International Journal
Volume 26, 1999 - Issue 1-4
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Section H: Materials processing – CVD

Direct deposition of SrBi2Ta2O9 Film on IrO2 electrode using liquid source CVD method

Takashi Eshita Fujitsu Laboratories Ltd, 10-1 Morinosato-Wakamiya, Atsugi, 2430197, Japan
,
Hideki Yamawaki Fujitsu Laboratories Ltd, 10-1 Morinosato-Wakamiya, Atsugi, 2430197, Japan
,
Shinji Miyagaki Fujitsu Laboratories Ltd, 10-1 Morinosato-Wakamiya, Atsugi, 2430197, Japan
&
Yoshihiro Arimoto Fujitsu Laboratories Ltd, 10-1 Morinosato-Wakamiya, Atsugi, 2430197, Japan
Pages 103-108 | Received 07 Mar 1999, Published online: 19 Aug 2006

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K. Uchiyama, K. Tanaka, Y. Shimada, M. Azuma, T. Otsuki, S. Narayan, V. Joshi, C. A. Paz de Araujo & L.D. McMillan. (2001) Low temperature crystallization of mocvd deposited sbt films. Integrated Ferroelectrics 36:1-4, pages 119-126.
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Articles from other publishers (2)

Norimasa Nukaga, Takayuki Watanabe, Tomohiro Sakai, Toshimasa Suzuki & Yuji Nishi. (2011) Hetero-epitaxial Growth of (1, 0, m+1) One Axis-oriented Bismuth Layered Structured Ferroelectrics Thin Films Directly Crystallized by MOCVD. MRS Proceedings 688.
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Keisuke Saito, Masatoshi Mitsuya, Toshimasa Suzuki, Yuji Nishi, Masayuki Fujimoto, Masanori Nukaga, Isao Yamaji, Takao Akai & Hiroshi Funakubo. (2011) Preparations and Characterizations of Epitaxial SrBi2Ta2O9 Thin Films. MRS Proceedings 655.
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