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Integrated Ferroelectrics
An International Journal
Volume 27, 1999 - Issue 1-4
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Section N: Circuits and devices

Integration of a split word line ferroelectric memory using a novel etching technology

Dong-Chun Kim LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Hyo-Jin Nam LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
William Jo LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Heon-Min Lee LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Seong-Moon Cho LG Corporate Institute of Technology, Seoul, 137-724, Korea
,
Jong-Uk Bu LG Corporate Institute of Technology, Seoul, 137-724, Korea
&
Hee-Bok Kang LG Semicon, Cheongju, 361-480, Korea
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Pages 279-290 | Received 07 Mar 1999, Published online: 19 Aug 2006

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Hyo-Jin Nam, Seong-Moon Cho, Youngjoo Yee, Heon-Min Lee, Dong-Chun Kim, Jong-Uk Bu & Jaewan Hong. (2001) Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy. Integrated Ferroelectrics 35:1-4, pages 185-197.
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Hyo-Jin Nam, Seong-Moon Cho, Young-Sik Kim, Dong-Chun Kim & Jong-Uk Bu. (2001) Micromirror actuated by PZT film for optical application. Integrated Ferroelectrics 41:1-4, pages 63-72.
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Articles from other publishers (3)

Young-Sik Kim, Hyo-Jin Nam, Seong-Moon Cho, Jae-Wan Hong, Dong-Chun Kim & Jong U. Bu. (2003) PZT cantilever array integrated with piezoresistor sensor for high speed parallel operation of AFM. Sensors and Actuators A: Physical 103:1-2, pages 122-129.
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Youngjoo Yee, Hyo-Jin Nam, See-Hyung Lee, Jong Uk Bu & Joong-Won Lee. (2001) PZT actuated micromirror for fine-tracking mechanism of high-density optical data storage. Sensors and Actuators A: Physical 89:1-2, pages 166-173.
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Youngjoo Yee, Hyo-Jin Nam, See-Hyung Lee, Jong Uk Bu, Young-Sam Jeon & Seong-Moon Cho. (2000) PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage. PZT actuated micromirror for nano-tracking of laser beam for high-density optical data storage.

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