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Machining Science and Technology
An International Journal
Volume 15, 2011 - Issue 3
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Original Articles

ENERGY DEPOSITION AND NON-THERMAL ABLATION IN FEMTOSECOND LASER GROOVING OF SILICON

D. P. Wan School of Mechanical and Manufacturing Engineering, The University of New South Wales, Sydney, AustraliaView further author information
,
Jun Wang School of Mechanical and Manufacturing Engineering, The University of New South Wales, Sydney, AustraliaCorrespondence[email protected]
&
Philip Mathew School of Mechanical and Manufacturing Engineering, The University of New South Wales, Sydney, Australia
Pages 263-283 | Published online: 22 Aug 2011

Citations (18)

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Read on this site (2)

Yuhan Chen, Jun Wang & Ming Chen. (2019) Enhancing the machining performance by cutting tool surface modifications: a focused review. Machining Science and Technology 23:3, pages 477-509.
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K. J. Huang, S. Wang & L. Tang. (2015) Simulation and experiment of specimen size on the effect of laser scribing width and depth of Al2O3 ceramics. Materials Research Innovations 19:sup10, pages S10-239-S10-243.
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Articles from other publishers (16)

Jianbo Chen, Xiaoxiao Chen, Xuanhua Zhang & Wenwu Zhang. (2024) Effect of laser incidence angle on the femtosecond laser ablation characteristics of silicon carbide ceramics. Optics and Lasers in Engineering 172, pages 107849.
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Ru Zhang, Quanjing Wang, Chuanzhen Huang, Jun Wang, Aijun Tang & Wenbo Zhao. (2023) Energy Transfer Between Femtosecond Laser and Silicon Carbide. JOM 75:9, pages 4047-4058.
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Bing Dong, Zongwei Xu, Changkun Shi, Kun Zhang, Yuheng Zhang, Rushuai Hua, Wei Zhao & Jianshi Wang. (2023) High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser. Optics & Laser Technology 163, pages 109338.
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Asif Shah. (2022) Cascading shocks and heated electrons probability distributions on the surface and inside silicon target irradiated by femto-second laser pulse. Materials Science in Semiconductor Processing 151, pages 106955.
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Hao-Jie An, Jin-Shi Wang & Feng-Zhou Fang. (2021) Material removal at atomic and close-to-atomic scale by high-energy photon: a case study using atomistic-continuum method. Advances in Manufacturing 10:1, pages 59-71.
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Ru Zhang, Chuanzhen Huang, Jun Wang, Hongtao Zhu & Hanlian Liu. (2021) Fabrication of high-aspect-ratio grooves with high surface quality by using femtosecond laser. Industrial Lubrication and Tribology 73:5, pages 718-726.
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Yilin Su, Yizhe Zhao, Shengyuan Jiang, Xuyan Hou & Minghui Hong. (2021) Anisotropic Superhydrophobic Properties of Bioinspired Surfaces by Laser Ablation of Metal Substrate inside Water. Advanced Materials Interfaces 8:16, pages 2100555.
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Zhaoxuan Yan, Qingyan lin, Guoji Li, Yong Zhang, Wenjun Wang & Xuesong Mei. (2020) A combined model for formation mechanism of ripples induced by femtosecond laser on silicon carbide. Applied Physics A 126:11.
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Ru Zhang, Chuanzhen Huang, Jun Wang, Hongtao Zhu, Peng Yao & Shaochuan Feng. (2018) Micromachining of 4H-SiC using femtosecond laser. Ceramics International 44:15, pages 17775-17783.
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Aur?lien Sikora, Lahouari Fares, J?r?me Adrian, Vincent Goubier, Anne Delobbe, Antoine Corbin, Marc Sentis & Thierry Sarnet. (2017) Picosecond laser micromachining prior to FIB milling for electronic microscopy sample preparation. Applied Surface Science 418, pages 607-615.
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Hao Zhu, Jun Wang, Peng Yao & Chuanzhen Huang. (2017) Heat transfer and material ablation in hybrid laser-waterjet microgrooving of single crystalline germanium. International Journal of Machine Tools and Manufacture 116, pages 25-39.
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Viboon Tangwarodomnukun. (2016) Overflow-assisted laser machining of titanium alloy: surface characteristics and temperature field modeling. The International Journal of Advanced Manufacturing Technology 88:1-4, pages 147-158.
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W. Charee, V. Tangwarodomnukun & C. Dumkum. (2016) Ultrasonic-assisted underwater laser micromachining of silicon. Journal of Materials Processing Technology 231, pages 209-220.
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Wisan Charee, Viboon Tangwarodomnukun & Chaiya Dumkum. (2014) Laser ablation of silicon in water under different flow rates. The International Journal of Advanced Manufacturing Technology 78:1-4, pages 19-29.
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V. Tangwarodomnukun, J. Wang, C.Z. Huang & H.T. Zhu. (2014) Heating and material removal process in hybrid laser-waterjet ablation of silicon substrates. International Journal of Machine Tools and Manufacture 79, pages 1-16.
Crossref
Sivakumar Manickam, Jun Wang & Chuanzhen Huang. (2013) Laser–material interaction and grooving performance in ultrafast laser ablation of crystalline germanium under ambient conditions. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 227:11, pages 1714-1723.
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