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Mechanics of Advanced Materials and Structures Volume 29, 2022 - Issue 28
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Original Articles

Effects of ultrasonic amplitude on sapphire ultrasonic vibration assisted chemical mechanical polishing by experimental and CFD method

Mufang ZhouSchool of Mechatronics Engineering, Key Laboratory of Tribology, Nanchang University, Nanchang, Jiangxi, ChinaView further author information
,
Min ZhongSchool of Mechatronics Engineering, Key Laboratory of Tribology, Nanchang University, Nanchang, Jiangxi, ChinaView further author information
&
Wenhu XuSchool of Mechatronics Engineering, Key Laboratory of Tribology, Nanchang University, Nanchang, Jiangxi, ChinaCorrespondence[email protected]
View further author information
Pages 7086-7103 | Received 10 Aug 2021, Accepted 09 Oct 2021, Published online: 04 Nov 2021

Citations (4)

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Nikolay Bukharin, M.A. Farrokhzad & Mouhammad El Hassan. (2023) A comprehensive analysis of the erosion in a carbon steel boiler tube elbow through the use of 3D mapping of the corroded surface and CFD modeling. Mechanics of Advanced Materials and Structures 0:0, pages 1-9.
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Articles from other publishers (3)

Mufang Zhou, Min Zhong & Wenhu Xu. (2023) Novel model of material removal rate on ultrasonic-assisted chemical mechanical polishing for sapphire. Friction.
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Fang-Jung Shiou, Zhao-Li Ding & Sun-Peng Lin. (2022) Reduction in the Volumetric Wear of a Ball Polishing Tool Using Ultrasonic-Vibration-Assisted Polishing Process. Lubricants 10:12, pages 339.
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Zhongyang Li, Zhaohui Deng, Jimin Ge, Rongjing Zhuo & Linlin Wan. (2022) Material Removal Rate Prediction for Sapphire Double-Sided CMP Based on RSM-SVM. ECS Journal of Solid State Science and Technology 11:8, pages 084002.
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