The elasticity and piezoelectricity of AlN containing charged vacancies

Qiaoya Lva Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, China;c Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore;d Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, SingaporeView further author information

Jian Qiua Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, ChinaView further author information

Quan Wena Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, ChinaCorrespondence[email protected]
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The elasticity and piezoelectricity of AlN containing charged vacancies

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The elasticity and piezoelectricity of AlN containing charged vacancies

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