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Research Article
The elasticity and piezoelectricity of AlN containing charged vacancies
Qiaoya Lva Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, China;c Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore;d Center for Intelligent Sensors and MEMS, National University of Singapore, Singapore, SingaporeView further author information
, Jian Qiua Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, ChinaView further author information
& Quan Wena Microsystem Research Center, Chongqing University, Chongqing, China;b College of Optoelectronic Engineering, Chongqing University, Chongqing, ChinaCorrespondence[email protected]
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Article: 2332242
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Published online: 16 Apr 2024
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