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Articles

Fundamental simulation studies of CONWIP in front-end wafer fabrication

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Pages 232-246 | Received 23 Mar 2014, Accepted 24 Mar 2015, Published online: 03 Jun 2015

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D S Nair & J F Chin. (2019) General Process Change Qualification framework for Wafer Fabrication. IOP Conference Series: Materials Science and Engineering 530:1, pages 012035.
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