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Separation Science and Technology Volume 39, 2005 - Issue 9
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Original Articles

Measurement of Inorganic Acidic Gases and Particles from the Stack of Semiconductor and Optoelectronic Industries

Cheng‐Hsiung Huang Department of Environmental Engineering and Health, Yuanpei University of Science and Technology, Hsin Chu, 330, TaiwanCorrespondence[email protected]
,
Yung‐Tai Ho Institute of Environmental Engineering, National Chiao Tung University, Hsin Chu, Taiwan
&
Chuen‐Jinn Tsai Institute of Environmental Engineering, National Chiao Tung University, Hsin Chu, Taiwan
Pages 2223-2234 | Published online: 08 Jul 2010

Citations (8)

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Hak-Joon Kim, Bangwoo Han, Yong-Jin Kim, Seok-Jun Yoa & Tetsuji Oda. (2012) Integration of a nonmetallic electrostatic precipitator and a wet scrubber for improved removal of particles and corrosive gas cleaning in semiconductor manufacturing industries. Journal of the Air & Waste Management Association 62:8, pages 905-915.
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Articles from other publishers (7)

Thi-Cuc Le, Gung-Hwa Hong, Guan-Yu Lin, Ziyi Li, David Y. H. Pui, Yi-Ling Liou, Bing-Tsai Wang & Chuen-Jinn Tsai. (2021) Honeycomb wet scrubber for acidic gas control: modeling and long-term test results. Sustainable Environment Research 31:1.
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Hak-Joon Kim, Myungjoon Kim, Bangwoo Han, Chang Gyu Woo, Ayyoub Zouaghi, Noureddine Zouzou & Yong-Jin Kim. (2019) Fine particle removal by a two-stage electrostatic precipitator with multiple ion-injection-type prechargers. Journal of Aerosol Science 130, pages 61-75.
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Yong-Jin Kim, Bangwoo Han, Chang Gyu Woo & Hak-Joon Kim. (2017) Performance of Ultrafine Particle Collection of a Two-Stage ESP Using a Novel Mixing Type Carbon Brush Charger and Parallel Collection Plates. IEEE Transactions on Industry Applications 53:1, pages 466-473.
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Chih-Liang Chien, Aditya Prana Iswara, Yi-Ling Liou, Bing-Tsai Wang, Jui-Chiao Chang, Yi-Hung Hung & Chuen-Jinn Tsai. (2015) A real-time monitoring system for soluble gas pollutants and it’s application for determining the control efficiency of packed towers. Separation and Purification Technology 154, pages 137-148.
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Hak-Joon Kim, Bangwoo Han, Chang-Gyu Woo, Yong-Jin Kim, Seong-Jin Park & Jong-Pil Yoon. (2015) Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates. Ultrafine particle collection performance of an two-stage ESP using a novel mixing type carbon brush charger and parallel collection plates.
Chih-Liang Chien, Chuen-Jinn Tsai, Shiang-Ru Sheu, Yu-Hsiang Cheng & Alexander Mihailovich Starik. (2015) High-efficiency parallel-plate wet scrubber (PPWS) for soluble gas removal. Separation and Purification Technology 142, pages 189-195.
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Yung-Chieh Tsao, Chang-Fu Wu, Pao-Erh Chang, Shin-Yu Chen & Yaw-Huei Hwang. (2011) Efficacy of using multiple open-path Fourier transform infrared (OP-FTIR) spectrometers in an odor emission episode investigation at a semiconductor manufacturing plant. Science of The Total Environment 409:17, pages 3158-3165.
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