108
Views
8
CrossRef citations to date
0
Altmetric
Original Articles

Measurement of Inorganic Acidic Gases and Particles from the Stack of Semiconductor and Optoelectronic Industries

, &
Pages 2223-2234 | Published online: 08 Jul 2010

References

  • Perry , R. H. 1984 . Perry's Chemical Engineers' Handbook , 6th Ed. 19 – 41 . New York : McGraw‐Hill .
  • Spengler , J. D. , Brauer , M. and Koutrakis , P. 1990 . Acid air and health . Environ. Sci. Technol. , 24 : 946
  • 1999 . “ Taiwan EPA ” . In Air Pollution Regulation and Emission Standard for Semiconductor Manufacturing Industry Taipei, , Taiwan : Taiwan EPA .
  • Possanzini , M. , Febo , A. and Liberti , A. 1983 . New design of a high‐performance denuder for the sampling of atmospheric pollutants . Atmos. Environ. , 17 : 2605
  • Pui , D. Y.H. , Lewis , C. W. , Tsai , C. J. and Liu , B. Y.H. 1990 . A compact coiled denuder for atmospheric sampling . Environ. Sci. Technol. , 24 : 307
  • Koutrakis , P. , Sioutas , C. , Ferguson , S. T. and Wolfson , J. M. 1993 . Development and evaluation of a glass honeycomb denuder/filter pack system to collect atmospheric gases and particles . Environ. Sci. Technol. , 27 : 2497
  • Sioutas , C. , Wang , P. Y. , Ferguson , S. T. and Koutrakis , P. 1996 . Laboratory and field evaluation of an improved glass honeycomb denuder/filter pack sampler . Atmos. Environ. , 30 : 885
  • Poon , W. S. , Pui , D. Y.H. , Lee , C. T. and Liu , B. Y.H. 1994 . A compact porous‐metal denuder for atmospheric sampling of inorganic aerosols . J. Aerosol Sci. , 25 : 923
  • Tsai , C. J. , Huang , C. H. , Wang , S. H. and Shih , T. S. 2001 . Design and testing of a personal porous‐metal denuder . Aerosol Sci. Technol. , 35 : 611
  • Tsai , C. J. , Huang , C. H. , Wang , S. H. and Shih , T. S. 2001 . Collection efficiency and capacity of three samplers for acidic and basic gases . Environ. Sci. Technol. , 35 : 2572
  • Tsai , C. J. , Chang , C. T. , Liu , T. W. , Huang , C. C. , Chien , C. L. and Chein , H. M. 2004 . Emission characteristics and control efficiency of acidic and basic gases and aerosols from packed towers . Atmos. Environ. , 38 : 643

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.