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Surface Engineering Volume 22, 2006 - Issue 1
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Articles

High deposition rate magnetrons: key elements and advantages

V. S. MitinCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, Russia
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E. I. SharipovCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, RussiaCorrespondence[email protected]
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A. V. MitinCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, Russia
Pages 5-10 | Published online: 19 Jul 2013

Citations (13)

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Read on this site (3)

Yun-peng He, Shi-bo Bi, Ji-ping Yin, Shao-bo Lv, Rui-sheng Wang & Zeng Lin. (2021) Prediction of midfrequency sputtering cathode erosion position with vertical magnetic field. Surface Engineering 37:3, pages 381-389.
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C W Chen, D Y Chen, C Y Hsu, Y H Chang & K H Hou. (2011) Spectrally selective Al/AlN/Al/AlN tandem solar absorber by inline reactive ac magnetron sputtering. Surface Engineering 27:8, pages 616-622.
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M. R. Cruz & M. H. Staia. (2006) Ion nitrided AISI H13 tool steel Part 2 – High temperature performance under sliding wear conditions. Surface Engineering 22:5, pages 367-374.
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Articles from other publishers (10)

D. B. Zolotukhin. (2023) Planar Magnetron with Electron Injection and Reflective Electrode: Numerical Simulation of Functioning Processes. Plasma Physics Reports 49:2, pages 296-299.
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Ali Ayachi Omar, Alexander Grigoryvich Luchkin, Mohamad Raja Alsayed Omar & Nail Faikovich Kashapov. (2022) The Effect Magnet Design on Controlling the Target Erosion Profile for DC Magnetron with the Rectangular Target. Plasma Chemistry and Plasma Processing 43:1, pages 361-379.
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Ernests Jansons, Janis Lungevics, Uldis Kanders, Armands Leitans, Guna Civcisa, Oskars Linins, Karlis Kundzins & Irina Boiko. (2022) Tribological and Mechanical Properties of the Nanostructured Superlattice Coatings with Respect to Surface Texture. Lubricants 10:11, pages 285.
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V. S. Mitin, V. I. Novikov, A. I. Sharapaev & A. G. Muradova. (2017) Preparation of steel/titanium dioxide/titanium three-layer composite membranes. Petroleum Chemistry 56:10, pages 915-919.
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P. I. Vysikaylo, V. S. Mitin, A. A. Markin, A. Yu. Yakovlev & V. V. Belyaev. (2016) Cooper-Carbon Nanostructured Composite Coatings with Controlled Structure. Open Journal of Applied Sciences 06:03, pages 195-207.
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J. Lungevics, A. Leitans, J. Rudzitis, N. Bulahs, P. Nazarovs & V. Kovalenko. (2016) Tribological Properties of PVD Carbon-Copper Composite Films Reinforced by Titanium. Latvian Journal of Physics and Technical Sciences 53:1.
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U. Kanders, K. Kanders, J. Maniks, V. Mitin, V. Kovalenko, P. Nazarovs & D. Erts. (2015) Nanoindentation response analysis of Cu-rich carbon–copper composite films deposited by PVD technique. Surface and Coatings Technology 280, pages 308-316.
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J. Maniks, V. Mitin, U. Kanders, V. Kovalenko, P. Nazarovs, M. Baitimirova, R. Meija, R. Zabels, K. Kundzins & D. Erts. (2015) Deformation behavior and interfacial sliding in carbon/copper nanocomposite films deposited by high power DC magnetron sputtering. Surface and Coatings Technology 276, pages 279-285.
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A. Leitans, N. Bulaha & J. Lungevics. (2015) Tribological Properties of Sputter Deposited Carbon-Copper Composite Films. Tribological Properties of Sputter Deposited Carbon-Copper Composite Films.
V. N. Pashentsev. (2010) Characteristics of the magnetron discharge plasma at large distances from the cathode. Plasma Physics Reports 36:13, pages 1215-1218.
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