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Surface Engineering Volume 22, 2006 - Issue 1
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Articles

High deposition rate magnetrons: key elements and advantages

V. S. MitinCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, Russia
,
E. I. SharipovCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, RussiaCorrespondence[email protected]
&
A. V. MitinCentre Science-Knowledge Technological and Social Innovations (NETSI), 9/4261 Marshal Vassilevsky street, Moscow 123098, Russia
Pages 5-10 | Published online: 19 Jul 2013

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