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Advances in Applied Ceramics
Structural, Functional and Bioceramics
Volume 112, 2013 - Issue 5
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Original Article

Advanced indium tin oxide ceramic sputtering targets (rotary and planar) for transparent conductive nanosized films

E MedvedovskiUmicore Thin Film Products, 50 Sims Ave., Providence, RI 02909, USACorrespondence[email protected]
,
N A AlvarezUmicore Thin Film Products, 50 Sims Ave., Providence, RI 02909, USA
,
C J SzepesiUmicore Thin Film Products, 50 Sims Ave., Providence, RI 02909, USA
,
O YankovUmicore Thin Film Products, 50 Sims Ave., Providence, RI 02909, USA
&
P Lippens Umicore Thin Film Productsp/a Kasteelstraat 7, Olen B-2250, Belgium
Pages 243-256 | Received 02 Jul 2012, Accepted 13 Oct 2012, Published online: 18 Nov 2013

Citations (15)

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Read on this site (2)

D. Chen, C. X. Jiang, H. L. Sun, W. Zhi, B. Feng, X. Lu, K. Duan, J. Weng & J. X. Wang. (2014) Sb2O3 doped and microwave assisted sintering of ITO. Advances in Applied Ceramics 113:4, pages 240-244.
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Q. Luo, Q. Z. Cai, J. He, X. W. Li & X. D. Chen. (2014) Characterisation and photocatalytic activity of SnO2 films via plasma electrolytic oxidation. Advances in Applied Ceramics 113:4, pages 228-233.
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Articles from other publishers (13)

Ting Liu, Zhucheng Jiang & Jiaxiang Liu. (2023) Achieving high relative density and low resistivity in indium tin oxide targets via Bi2O3-CeO2 additive. Journal of Alloys and Compounds 968, pages 171998.
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Ting Liu, Zhucheng Jiang & Jiaxiang Liu. (2023) Novel seed-assisted synthesis of indium tin oxide submicro-cubes and their resistivity. Frontiers of Chemical Science and Engineering.
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Akhmed Akhmedov, Aslan Abduev, Eldar Murliev, Abil Asvarov, Arsen Muslimov & Vladimir Kanevsky. (2021) The ZnO-In2O3 Oxide System as a Material for Low-Temperature Deposition of Transparent Electrodes. Materials 14:22, pages 6859.
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Stephen J. Turrell, Stefanie Zekoll, Junliang Liu, Chris R.M. Grovenor & Susannah C. Speller. (2021) Optimization of a potential manufacturing process for thin-film LiCoO2 cathodes. Thin Solid Films 735, pages 138888.
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Christelle Habis, Jean Zaraket & Michel Aillerie. (2021) Zinc Oxide Thin Film Morphology as Function of Substrate Position During Sputtering Process. Key Engineering Materials 900, pages 103-111.
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Hongyu Li, Shi Yin, Gangqiang Dong, Ge Cui, Mengjie Chen, Jian Chen, Xixiang Xu, Lianghuan Feng, Jingquan Zhang & Cao Yu. (2021) In-Sn Oxide Bilayer Transparent Conductive Film by DC Magnetron Sputtering for Silicon Heterojunction Solar Cells. IEEE Journal of Photovoltaics 11:2, pages 312-318.
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Min-Ho Hwang, Heon Kong, Ji-Won Jeong & Hyun-Yong Lee. (2020) Thermal stability enhancement of SnO2/Ag/SnO2 transparent electrodes using Ni-doped Ag. Superlattices and Microstructures 141, pages 106503.
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Fangsheng Mei, Tiechui Yuan, Ruidi Li, Kai Qin & Jingwei Huang. (2018) Microstructure evolution and grain orientation in ITO targets and their effects on the film characteristics. Journal of Materials Science: Materials in Electronics 29:17, pages 14620-14634.
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Yusuke Morita & Naoki Ohtani. (2018) Fabrication of aluminum and gallium codoped ZnO multilayer transparent conductive films by spin coating method and discussion about improving their performance. Japanese Journal of Applied Physics 57:2S2, pages 02CB03.
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Duo Pan, Shengsong Ge, Xiyu Zhang, Xianmin Mai, Shengyao Li & Zhanhu Guo. (2018) Synthesis and photoelectrocatalytic activity of In 2 O 3 hollow microspheres via a bio-template route using yeast templates . Dalton Transactions 47:3, pages 708-715.
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Ivan A. Starkov, Ilya A. Nyapshaev, Alexander S. Starkov, Sergey N. Abolmasov, Alexey S. Abramov, Vladimir S. Levitskii & Evgeny I. Terukov. (2017) Influence of substrate movement on the ITO film thickness distribution during magnetron sputtering. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 35:6.
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Rongxian Zhang, Xiaogang Lu, Liying Huang, Zhijiang Ke & Yeping Li. (2017) Ball-milling combined calcination synthesis of In2O3/C3N4 for high photocatalytic activity under visible light irradiation. Journal of Materials Science: Materials in Electronics 28:11, pages 8255-8265.
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Jingchuo Wang, Fan Zhang, Yujun Wang, Guangsheng Luo & Weibin Cai. (2016) A size-controllable preparation method for indium tin oxide particles using a membrane dispersion micromixer. Chemical Engineering Journal 293, pages 1-8.
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