ABSTRACT
A novel silicon fiber-optic temperature sensor based on a 1D photonic crystal is theoretically discussed in this paper. The sensing element consists of a 1D photonic crystal with a central defect at the end of a U-groove that can be created in a silicon substrate by silicon deep etching which facilitates the integration of fiber-optic and sensor in a single silicon die. Temperature variations can be monitored by scanning the shift in wavelength of reflection peak, which is induced by the thermo-optic effect and thermal expansion effect. This sensing configuration shows a nearly linear temperature response over the large temperature range of 0–200°C with a sensitivity of 68 pm/°C that is seven times better than the conventional FBG sensors.
Acknowledgments
The author thanks Prof. Mahmoud Shahabadi from the School of Electrical and Computer Engineering, University of Tehran, for his invaluable advice and Mr. Amideddin Mataji-Kajouri from the School of Electrical and Computer Engineering, University of Tehran, for supplying the TLM matlab code.
Disclosure statement
No potential conflict of interest was reported by the author.