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Research Article

Vanadium Oxide Thermal Sensitive Thin Film with TiN Absorbing Layer for Uncooled Infrared Bolometer

, , , , , , , , & show all
Pages 43-49 | Received 02 Sep 2020, Accepted 15 Feb 2021, Published online: 30 Jun 2021
 

Abstract

Multilayers’ absorption DMDM structure of SiO2/TiNx/SiO2/VOx structure for 8-14 infrared wavelengths is proposed and simulated. Between mid-infrared 8 μm and 14 μm wavelengths, infrared detector with this structure and thermal sensitive VOx of −7%/K TCR, which exhibits high infrared absorption about average 83%, has been fabricated and tested successfully.

Additional information

Funding

This work was supported by Qingdao Postdoctoral Application Research Project; National Natural Science Foundation of China (grant number 81600470, 21874078, 22074072); China Postdoctoral Science Foundation Special Funding Project (grant number 2016T90612); Qingdao Applied Basic Research Program Youth Project (grant number 19-6-2-59-cg); Taishan Young Scholar Program of Shandong Province (tsqn20161027); Major Science and Technology Innovation Project of Shandong Province (2018CXGC1407), Key Research and Development Project of Shandong Province (2016GGX102028, 2016GGX102039, 2017GGX20111), and First Class Discipline Project of Shandong Province.

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