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Integrated Ferroelectrics
An International Journal
Volume 216, 2021 - Issue 1: Proceedings of the Nineteenth China International Nanoscience and Technology Symposium (CINSTS20), Part II of V
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Research Article

Vanadium Oxide Thermal Sensitive Thin Film with TiN Absorbing Layer for Uncooled Infrared Bolometer

Bin Wanga Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, China;b State Key Laboratory of Bio-Fibers and Eco-Textiles, Micro-Nano technology College, Qingdao University, Qingdao, ChinaView further author information
,
Ning Lic College of Basic Medicine, Qingdao University, Qingdao, ChinaView further author information
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Wan-Feng Xiea Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, China;b State Key Laboratory of Bio-Fibers and Eco-Textiles, Micro-Nano technology College, Qingdao University, Qingdao, ChinaView further author information
,
Jian-Jun Laid Wuhan National Laboratory for Optoelectronics, Wuhan, ChinaView further author information
,
Shu-Ying Wanga Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, China;b State Key Laboratory of Bio-Fibers and Eco-Textiles, Micro-Nano technology College, Qingdao University, Qingdao, ChinaView further author information
,
Yu Zhenga Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, China;b State Key Laboratory of Bio-Fibers and Eco-Textiles, Micro-Nano technology College, Qingdao University, Qingdao, ChinaView further author information
,
Zong-Tao Chia Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, China;b State Key Laboratory of Bio-Fibers and Eco-Textiles, Micro-Nano technology College, Qingdao University, Qingdao, ChinaView further author information
,
Bing Yua Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, ChinaView further author information
,
You-Qing Shena Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, ChinaView further author information
&
Hai-Lin Conga Institute of Biomedical Materials and Engineering, College of Material Science Engineering, College of Electronic Information, Qingdao University, Qingdao, ChinaCorrespondence[email protected]
View further author information
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Pages 43-49 | Received 02 Sep 2020, Accepted 15 Feb 2021, Published online: 30 Jun 2021

References

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