Coessential-connection by microwave plasma chemical vapor deposition: a common process towards wafer scale single crystal diamond

Figures & data

Figure 1. P-T phase diagram of carbon-diamond.

Table 1. Summarization of HPHT technology for large crystal producing.

Year	Group	Size	Quality or method
1954	General Electric [9]	—	The first HPHT diamond
1959	Bovenkerk et al. [10]	—	Temperature gradient method developed
1970	General Electric [11]	1 ct	IIa type
1990	Sumitomo et al. [12]	9 ct	Ib
1963	China [13]	∼30 μm	Yellow crystal
1997	Shigley et al. [14]	∼1 ct	Colorless
2003	Simic et al. [15]	10 ct	Pink color
2014	D’Haenens-Johansson et al. [16]	—	SI clarity
2018	New Diamond Technology [17]	>30 ct	IIa

Figure 2. Cubic type (a) and belt type (b) HPHT systems.

Figure 3. More than 10 ct white and yellow HPHT diamond jewelry by NDT company [17].

Figure 4. Principles of CVD diamond process.

Figure 5. Photos and schematic of two typical CVD systems, HFCVD and MPCVD.

Table 2. Comparison of different CVD techniques.

Invented year	Type	Advantages	Disadvantages
1982	HFCVD [25]	Large area	Contaminate by filament
1983	MPCVD [26]	Pure & fast	Limited size
1985	RFCVD [27]	Large area	Limited by frequency, strongly damage
1988	DC-plasma jet CVD [28]	Fast deposition (exceed 20 mm/h)	Too high power
1988	Combustion flame CVD [29]	Simply system, high deposition rate	Bad crystal quality
1990	Electron cyclotron resonance (ECR) CVD [30]	High density plasma	Low growth rate

Figure 6. Schematic of diamond “mosaic” growth process [34].

Figure 7. Schematics of “Lift-off” technology for clone substrates production (top picture), and the 1–2 inch mosaic samples (bottom images) [49–51].

Figure 8. 1 and 2 inch mosaic diamond sample prepared by HIT group

Figure 9. Epitaxial lateral overgrowth (ELO) of CVD diamond [63, 64].

Figure 10. ELO of SCD by hollowing out the central part of substrate and thus suppress the extension of dislocation [65].

Figure 11. Largest single crystal CVD diamond by heteroepitaxial growth [73].

Figure 12. Evolution of Patterned nucleation growth based on diamond heteroepitaxy [80].

Figure 13. Diamond mosaic detector by CERN [81].

Figure 14. Schematic of nucleus growth and connection dynamic in coessential-connection

Figure 15. SEM and schematic of polycrystalline diamond cross-section [86].

Figure 16. Deviation of (a) nuclei size and (b) orientations.

Table 3. Summarization of large area diamond film.

Size	Group	Time	Crystalline
40 × 60 mm	AIST; Yamada et al. [51]	2014	Mosaic SCD
92 mm	Augsburg University; Schreck et al. [73]	2017	Heteroepitaxial SCD
8 inch	Korea Institute of Science and Technology; Chae et al. [91]	2010	PCD
2 inch	Harbin Institute of Technology; Shu et al. [92]	2019	Mosaic SCD

Figure 17. Grain size from smallest to largest within the framework of CC growth.

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