Fuzzy multiple attribute decision-making method for a large 300-mm fab layout design

Abstract

The trend in design of 300-mm wafer fabrication facilities is to seek means to bring about economies of scale. However, this may require trade-offs with various operational efficiencies. This research explores 10 alternative layout designs for a large 300-mm fabrication facility. These alternatives are the different combinations of independent and layer-based cellular design concepts, and are evaluated using a fuzzy multiple attribute decision-making method. A case study has been adopted for an empirical illustration. The results show that a megafab is not a preferred choice. The analysis concludes that a moderate-sized independent cell is a preferred design concept. The results provide fabrication facility management with guidelines for a future 300-mm layout design, which is the backbone of a cost-intensive 300-mm fabrication facility. Future research opportunities are also addressed.

Keywords:

• fuzzy set theory
• multiple attribute decision making
• plant layout
• 300-mm fab

Acknowledgement

This study is supported, in part, by the National Science Council of Taiwan, Republic of China, under grants NSC-95-2221-E-006-349-MY3.