Fuzzy multiple attribute decision-making method for a large 300-mm fab layout design

References

• Agrawal , GK and Heragu , SS . 2006 . A survey of automated material handling systems in 300-mm semiconductor fabs . IEEE Transactions on Semiconductor Manufacturing , 19 ( 1 ) : 112 – 120 .
   Web of Science ®Google Scholar
• Badiru , AB and Arif , A . 1996 . FLEXPERT: facility layout expert system using fuzzy linguistic relationship codes . IIE Transactions , 28 ( 4 ) : 295 – 308 .
   Web of Science ®Google Scholar
• Bellman , RE and Zadeh , LA . 1970 . Decision-making in a fuzzy environment . Management Science , 17 ( 4 ) : B141 – B164 .
   Web of Science ®Google Scholar
• Bowlin , WF . 1987 . Evaluating the efficiency of US air force real-property maintenance activities . Journal of the Operational Research Society , 38 ( 2 ) : 127 – 135 .
   Web of Science ®Google Scholar
• Chang , C-F and Chang , S-K . 1998 . A layer-based layout approach for semiconductor fabrication facilities . In: Proceedings of IEEE/ASMC conference, 23–25 September, Boston, MA , : 385 – 390 .
   Google Scholar
• Cheng , CH . 1999 . Evaluating weapon systems using ranking fuzzy numbers . Fuzzy Sets and Systems , 107 ( 1 ) : 25 – 35 .
   Web of Science ®Google Scholar
• Chiang , W-C . 2001 . Visual facility layout design system . International Journal of Production Research , 39 ( 9 ) : 1811 – 1836 .
   Web of Science ®Google Scholar
• Donaghey, C.E. and Pire, V.F., 1990. Solving the facilities layout problem with BLOCPLAN, Working paper. Industrial Engineering Department, University of Houston, Houston
   Google Scholar
• Dweiri , F and Meier , FA . 1996 . Application of fuzzy decision-making in facilities layout planning . International Journal of Production Research , 34 ( 11 ) : 3207 – 3225 .
   Web of Science ®Google Scholar
• Ertay , T . 1998 . Simulation approach in comparison of a pull system in a cell production system with a push system in a conventional production system according to flexible cost: a case study . International Journal of Production Economics , 56–57 ( 1 ) : 145 – 155 .
   Web of Science ®Google Scholar
• Ertay , T , Ruan , D and Tuzkaya , UR . 2006 . Integrating data envelopment analysis and analytic hierarchy for the facility layout design in manufacturing systems . Information Sciences , 176 ( 3 ) : 237 – 262 .
   Web of Science ®Google Scholar
• Evans , GW , Wilhelm , MR and Karwowski , W . 1987 . A layout design heuristic employing the theory of fuzzy sets . International Journal of Production Research , 25 ( 10 ) : 1431 – 1450 .
   Web of Science ®Google Scholar
• Geiger , CD . 1997 . Alternative facility layouts for semiconductor wafer fabrication facilities . IEEE Transactions on Components, Packaging, and Manufacturing Technology – Part C , 20 ( 2 ) : 152 – 163 .
   Google Scholar
• Karray , F . 2000 . Tools of soft computing as applied to the problem of facilities layout planning . IEEE Transactions on Fuzzy Systems , 8 ( 4 ) : 367 – 379 .
   Web of Science ®Google Scholar
• Kaufmann , A and Gupta , MM . 1985 . Introduction to fuzzy arithmetic: theory and applications , New York : Van Nostrand Reinhold .
   Google Scholar
• Lee , ES and Li , RJ . 1988 . Comparison of fuzzy numbers based on the probability measure of fuzzy events . Computers and Mathematics with Applications , 15 ( 10 ) : 887 – 896 .
   Web of Science ®Google Scholar
• Mackulak , GT and Savory , P . 2001 . A simulation-based experiment for comparing AMHS performance in a semiconductor fabrication facility . IEEE Transactions on Semiconductor Manufacturing , 14 ( 3 ) : 273 – 280 .
   Web of Science ®Google Scholar
• Meyersdorf , D and Taghizadeh , A . 1998 . Fab layout design methodology: case of 300 mm fabs . Semiconductor International , 21 ( 8 ) : 187 – 196 .
   Google Scholar
• Muther , R . 1973 . Systematic layout planning, , 2nd ed , Boston : Cahners Books .
   Google Scholar
• Negnevitsky , M . 2005 . Artificial intelligence: a guide to intelligent systems, , 2nd ed , England : Pearson Education .
   Google Scholar
• Peters , BA and Yang , T . 1997 . Integrated facility layout and material handling system design in semiconductor fabrication facilities . IEEE Transactions on Semiconductor Manufacturing , 10 ( 3 ) : 360 – 369 .
   Web of Science ®Google Scholar
• Petroni , A and Rizzi , A . 2002 . Fuzzy logic based methodology to rank shop floor dispatching rules . International Journal Production Economics , 76 ( 3 ) : 99 – 108 .
   Web of Science ®Google Scholar
• Raoot , AD and Rakshit , A . 1991 . A ‘fuzzy’ approach to facilities layout planning . International Journal of Production Research , 29 ( 4 ) : 835 – 857 .
   Web of Science ®Google Scholar
• Ribeiro , RA . 1996 . Fuzzy multiple attribute decision making: a review and new preference elicitation techniques . Fuzzy Sets and Systems , 78 ( 2 ) : 155 – 181 .
   Web of Science ®Google Scholar
• Sohn, B., Pillai, D., and Acker, N., 2000. 300-mm factory design for operational effectiveness. Proceedings of the IEEE/ASMC Conference, Munich, Germany
   Google Scholar
• Tompkins , JA . 2003 . Facilities planning, , 3rd ed , New York : Wiley .
   Google Scholar
• Urban , TL , Chiang , W-C and Russell , RA . 2000 . The integrated machine allocation and layout problem . International Journal of Production Research , 38 ( 13 ) : 2911 – 2930 .
   Web of Science ®Google Scholar
• Wang , MJ , Chung , HC and Wu , HS . 2003 . The evaluation of manual FOUP handling in 300 mm wafer fab . IEEE Transactions on Semiconductor Manufacturing , 16 ( 3 ) : 551 – 554 .
   Web of Science ®Google Scholar
• Wilhelm , MR , Karwowski , W and Evans , GW . 1987 . A fuzzy set approach to layout analysis . International Journal of Production Research , 25 ( 10 ) : 1431 – 1450 .
   Web of Science ®Google Scholar
• Wright , R . 1999 . 300mm factory layout and automated materials handling . Solid State Technology , 42 ( 12 ) : 35 – 42 .
   Web of Science ®Google Scholar
• Yager , RR . 1980 . On a general class of fuzzy connectives . Fuzzy Sets and Systems , 4 ( 3 ) : 235 – 242 .
   Web of Science ®Google Scholar
• Yager , RR . 1981 . A procedure for ordering fuzzy subsets of the unit interval . Information Sciences , 24 ( 2 ) : 143 – 161 .
   Web of Science ®Google Scholar
• Yang , T , Chen , M-C and Hung , C-C . 2007 . Multiple attribute decision-making methods for the dynamic operator allocation problem . Mathematics and Computers in Simulation , 73 ( 5 ) : 285 – 299 .
   Web of Science ®Google Scholar
• Yang , T and Hsieh , C-H . 2009 . Six-sigma project selection using national quality award criteria and Delphi fuzzy multiple criteria decision-making method . Expert Systems with Applications , 36 ( 4 ) : 7594 – 7603 .
   Web of Science ®Google Scholar
• Yang , T and Kuo , C . 2003 . A hierarchical AHP/DEA methodology for the facilities layout design problem . European Journal of Operational Research , 147 ( 1 ) : 128 – 136 .
   Web of Science ®Google Scholar
• Yang , T , Peters , BA and Tu , M . 2005 . Layout design for flexible manufacturing systems considering single-loop directional flow patterns . European Journal of Operational Research , 164 ( 2 ) : 440 – 455 .
   Web of Science ®Google Scholar
• Yang , T , Rajasekharan , M and Peters , BA . 1999 . Semiconductor fabrication facility design using a hybrid search methodology . Computers and Industrial Engineering , 36 ( 3 ) : 565 – 583 .
   Web of Science ®Google Scholar
• Zadeh , LA . 1965 . Fuzzy sets . Information and Control , 8 ( 3 ) : 338 – 353 .
   Google Scholar
• Zimmermann , H-J . 1987 . “ Fuzzy sets, decision making and expert systems ” . In International Series in Management Science/Operations Research , , Dordrecht : Kluwer Academic .
   Google Scholar