Secondary electron hyperspectral imaging: nanostructure and chemical analysis for the LV-SEM

ABSTRACT

Materials engineers have increasing control over nanoscale chemical composition and nanostructures. The latter can be easily analysed by the scanning electron microscope (SEM) yet nanoscale chemical analysis in the SEM poses challenges. Nevertheless, nanoscale chemical analysis capabilities have been developed in the LV-SEM by secondary electron hyperspectral imaging (SEHI). In this article, the insights that SEHI has provided into well characterised semiconductor, photovoltaic, polymer and hard carbon materials are reviewed. Instrument and experimental considerations for the obtainment of secondary electron hyper-spectra are discussed and recommendations for future analyses in the LV-SEM by SEHI are made.

KEYWORDS:

• Scanning electron microscopy
• low-voltage scanning electron microscopy
• secondary electron imaging
• secondary electron emission spectroscopy
• secondary electron hyperspectral imaging
• surface analysis
• energy dispersive X-ray analysis
• SEM
• LVSEM
• SEES
• SEHI
• EDX
• EDS
• WDX
• WDS

Acknowledgement

Thanks to my supervisor Dr Cornelia Rodenburg for her guidance during the writing of this literature review.

Disclosure statement

No potential conflict of interest was reported by the author(s).