FABRICATION AND CHARACTERIZATION OF IN-PLANE POLARIZED PZT FILMS WITH INTERDIGITAL ELECTRODES

ABSTRACT

In this paper, Pb(Zr_0.53,Ti_0.47)O₃ films are deposited on titania by sol-gel method, and PZT films of ∼4 μm in thickness are successfully obtained by repeating multi-coating and annealing. Based on the think film deposition processing, a laminated Pt/Ti/PZT/TiO₂/SiO₂/Si structure is proposed, and the PZT films are in-plane polarized by top InterDigital Electrodes (IDE). The capacitance-voltage curves of the PZT thick films are measured in a range of −40 V to 40 V, and the symmetric butterfly shapes of the curves indicate good ferroelectric properties of the films. The capacitance is found dependent on the parameters of the electrode configuration, and a simple equation for predicting the IDE capacitance is deduced.

Keywords:

• Lead zirconate titanate
• PZT thick film
• in-plane polarization
• interdigital electrode

ACKNOWLEDGMENTS

The authors greatly appreciate Dr. Qi Zhang's help in PZT film deposition, and thank very much for Huajun Fang, Yi Yang, and Xiaoming Wu for their valuable suggestions in processing improvement and results analysis. This work is supported by National Natural Science Foundation of China (90407023), and “863” Program of China (2004AA404240).