Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 88, 2007 - Issue 1
Submit an article Journal homepage
164
Views
2
CrossRef citations to date
0
Altmetric
SECTION I: MEMS, PYROELECTRIC/IR, OPTOELECTRONIC MATERIALS: THIN-FILM PROCESSING

FABRICATION AND CHARACTERIZATION OF IN-PLANE POLARIZED PZT FILMS WITH INTERDIGITAL ELECTRODES

CHAO WANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
TIANLING REN Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
ZHEYAO WANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
YIPING ZHU Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
,
NINGXIN ZHANG Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
&
LITIAN LIU Institute of Microelectronics, Tsinghua University, Beijing, 100084, P. R. China
Pages 3-11 | Received 31 May 2006, Published online: 12 Oct 2011

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.