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Integrated Ferroelectrics
An International Journal
Volume 24, 1999 - Issue 1-4
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Section A: Materials and processes for DRAMS

Structural properties of Ba0.6Sr0.4TiO3 thin films on epitaxial RuO2 electrodes

Q. X. Jia Materials and Science Technology Division, Mail Stop K763, Los Alamos National Laboratory, Los Alamos, New Mexico, 87545, USA
,
C. Kwon Materials and Science Technology Division, Mail Stop K763, Los Alamos National Laboratory, Los Alamos, New Mexico, 87545, USA
&
P. Lu Department of Materials Science and Engineering, New Mexico Tech, Socorro, New Mexico, 87801, USA
Pages 57-63 | Received 07 Mar 1999, Published online: 12 Sep 2006
 
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Abstract

For the first time, we have demonstrated that epitaxial Ba0.6Sr0.4TiO3 thin films can be grown on the epitaxial RuO2 electrodes by pulsed laser ablation. The Ba0.6Sr0.4TiO3 films, deposited on epitaxial (200) oriented RuO2 grown on (100) yttria-stabilized zirconia, exhibit single out-of-plane orientation as well as in-plane alignments. The detailed epitaxial relationships between the Ba0.6Sr0.4TiO3 films and the RuO2 electrodes have been analyzed by X-ray diffraction and transmission electron microscopy.

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