Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

ABSTRACT

We present a study of the synthesis and an evaluation of the corrosion resistance of Ti-Zr-Si-N coatings deposited by means of the co-sputtering technique on 316L steel and Ti6Al4V alloy substrates. The thin films were obtained using Ti₅Si₂ and Zr targets with 99.9% purity for the deposition, and a power of 200 W was applied in the DC source and 170 W in the RF source. The corrosion resistance was evaluated via the cyclic oxidation test with consistent cycles of 1 hour of cooling, 1 hour of heating, and 16 minutes of stabilisation for 300 cycles at a temperature of 600°. The coatings were characterised by means of scanning electron microscopy (SEM), X-ray diffraction (XRD), and confocal laser microscopy. The coating was effective up to 150 cycles for the case of 316L steel, and up to 50 cycles for the Ti6AlV alloy.

KEYWORDS:

• Ti-Zr-Si-N coatings
• co-sputtering
• corrosion resistance

Disclosure statement

No potential conflict of interest was reported by the authors.

ORCID

Julieta Cardenas http://orcid.org/0000-0001-6039-3924

Jersson Leon http://orcid.org/0000-0002-9198-1996

Jhon J. Olaya http://orcid.org/0000-0002-4130-9675

Additional information

Funding

The authors acknowledge the financial support of the Project of the Universidad Nacional de Colombia (UNAL) ‘RESISTENCIA A LA CORROSIÓN DE RECUBRIMIENTOS DE (Ag,Zr,Si)N y (Ti,Zr,Si)N PRODUCIDOS POR CO-SPUTTERING REACTIVO’.