Synthesis and high-temperature corrosion resistance of Ti-Zr-Si-N coatings deposited by means of sputtering

References

• Kirik GV, Kozak C, Opielak M. Protective coatings based on Zr-Ti-Si-N their physical and mechanical properties and phase composition. Przeglad Elektrotechniczny. 2012;88(10A):319–321.
   Web of Science ®Google Scholar
• Pilloud D, Dehlinger AS, Pierson JF, et al. Reactively sputtered zirconium nitride coatings: structural, mechanical, optical and electrical characteristics. Surf Coat Technol. 2003;174:338–344. doi: 10.1016/S0257-8972(03)00613-3
   Web of Science ®Google Scholar
• Kannan A, Reddy P. The effect of annealing on the structural, optical and electrical properties of titanium nitride (TiN) thin films prepared by DC magnetron sputtering with supported discharge. J Mater Sci: Mater Electron.. 2016; 27 (10):10427–10434.
   Web of Science ®Google Scholar
• Leclair P, Berera GP, Moodera JS. Titanium nitride thin films obtained by a modified physical vapor deposition process. Thin Solid Films. 2000;376(1–2):9–15. doi: 10.1016/S0040-6090(00)01192-5
   Web of Science ®Google Scholar
• Ingason AS, Magnus F, Agustsson JS, et al. In-situ electrical characterization of ultrathin TiN films grown by reactive dc magnetron sputtering on SiO2. Thin Solid Films. 2009;517(24):6731–6736. doi: 10.1016/j.tsf.2009.05.028
   Web of Science ®Google Scholar
• Cui X, Jin G, Hao J, et al. The influences of Si content on biocompatibility and corrosion resistance of Zr-Si-N films. Surf Coat Technol. 2013;228:S524–S528. doi: 10.1016/j.surfcoat.2012.04.060
   Web of Science ®Google Scholar
• Kavitha A, Kannan R, Reddy PS, et al. The effect of annealing on the structural, optical and electrical properties of titanium nitride (TiN) thin films prepared by DC magnetron sputtering with supported discharge. J Mater Sci: Mater Electron. 2016;27(10):10427–10434.
   Web of Science ®Google Scholar
• Paldey S, Dee SC. Single layer and multilayer wear resistant coatings of (Ti, Al) N: a review. Mater Sci Eng A. 2003;342(1–2):58–79. doi: 10.1016/S0921-5093(02)00259-9
   Web of Science ®Google Scholar
• Uglov VV, Anishchik VM, Khodasevich VV, et al. Structural characterization and mechanical properties of Ti–Zr–N coatings, deposited by vacuum arc. Surf Coat Technol. 2004;180:519–525. doi: 10.1016/j.surfcoat.2003.10.095
   Web of Science ®Google Scholar
• Chinsakolthanakorn S, Buranawong A, Witit-anun N. Characterization of nanostructured TiZrN thin films deposited by reactive DC magnetron co-sputtering. Procedia Eng. 2012;32:571–576. doi: 10.1016/j.proeng.2012.01.1310
   Google Scholar
• Lin Y, Huang J, Yu G. Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron sputtering. Thin Solid Films. 2010;518(24):7308–7311. doi: 10.1016/j.tsf.2010.04.099
   Web of Science ®Google Scholar
• Jiang N, Shen YG, Mai Y, et al. Nanocomposite Ti–Si–N films deposited by reactive unbalanced magnetron sputtering at room temperature. Mater Sci Eng B. 2004;106(2):163–171. doi: 10.1016/j.mseb.2003.09.033
   Google Scholar
• Hu X, Han Z, Li G, et al. Microstructure and properties of Ti–Si–N nanocomposite films. J Vac Sci Technol A. 2002;20:1921. doi: 10.1116/1.1508802
   Web of Science ®Google Scholar
• Saladukhin IA, Abadias G, Michel A, et al. Structure and hardness of quaternary TiZrSiN thin films deposited by reactive magnetron co-sputtering. Thin Solid Films. 2015;581:25–31. doi: 10.1016/j.tsf.2014.11.020
   Web of Science ®Google Scholar
• Sobol’ OV, Pogrebnyak AD, Beresnev VM. Effect of the preparation conditions on the phase composition, structure, and mechanical characteristics of vacuum-Arc Zr-Ti-Si-N coatings. Phys Met Metallogr. 2011;112(2):188–195. doi: 10.1134/S0031918X11020268
   Web of Science ®Google Scholar
• Pogrebnyak AD, Sobol’ OV, Beresnev VM, et al. Features of the structural state and mechanical properties of ZrN and Zr(Ti)-Si-N coatings obtained by ion-plasma deposition technique. Tech Phys Lett. 2009;35(10):925–928. doi: 10.1134/S1063785009100150
   Web of Science ®Google Scholar
• Lin YW, Huang JH, Yu GP, et al. Influence of ion bombardment on structure and properties of TiZrN thin film. Appl Surf Sci. 2015;354:155–160. doi:10.1016/j.apsusc.2015.02.190.
   Web of Science ®Google Scholar
• Yalamanchili K, Forsén R, Jiménez-Piqué E, et al. Structure, deformation and fracture of arc evaporated Zr-Si-N hard films. Surf Coat Technol. 2014;258:1100–1107. doi: 10.1016/j.surfcoat.2014.07.024
   Web of Science ®Google Scholar
• Braic M, Braic V, Vladescu A, et al. Solid solution or amorphous phase formation in TiZr-based ternary to quinternary multi-principal-element films. Prog Nat Sci. 2014;24(4):305–312. doi: 10.1016/j.pnsc.2014.06.001
   Web of Science ®Google Scholar
• Borja EN, Olaya JJ. A microstructural and corrosion resistance study of (Zr, Si. Ti)N-Ni coatings produced through co-sputtering. Dyna. 2018;85(207):192–187. doi: 10.15446/dyna.v85n207.73304
   Google Scholar
• Bolívar-Osorio FJ. Evaluation of the behavior at high temperatures of the coatings of aluminum, Si and aluminum modified with Si and Hf deposited through CVD-FBR on ferriform-martensitic steels (9-12% of Cr)[dissertation]. Madrid (Spain): Universidad Complutense de Madrid; 2009.Spanish.
   Google Scholar
• Pogrebnjak AD, Shpak AP, Beresnev VM, et al. Effect of thermal annealing in vacuum and in air on nanograin sizes in hard and superhard coatings Zr–Ti–Si–N. J Nanosci Nanotechnol. 2012;12(12):9213–9219. doi: 10.1166/jnn.2012.6777
   PubMed Web of Science ®Google Scholar
• Marulanda-Arevalo JL, Remolina-Millan A, Baron JA. Steam oxidation in stainless steel AISI 317 at 700 and 750° C. Dyna. 2013;80(179):151–156.
   Web of Science ®Google Scholar
• Rebouta L, Vaz F, Andritschky M, et al. Oxidation resistance of (Ti,Al,Zr,Si)N coatings in air. Surf Coat Technol. 1995;76:70–74. doi: 10.1016/0257-8972(95)02501-4
   Web of Science ®Google Scholar
• Beresnev VM, Klimenko SA, Toryanik IN, et al. Superhard coatings of the (Zr-Ti-Si)N and (Ti-Hf-Si)N systems produced by vacuum-arc deposition from a separated flow. J Superhard Mater. 2014;36(1):29–34. doi: 10.3103/S1063457614010055
   Web of Science ®Google Scholar
• Pogrebnjak A, Baidak V, Beresnev V, et al. Physical-mechanical properties of superhard nanocomposite coatings on base Zr-Ti-Si-N. Mater Sci. 2013;19(2):140–143.
   Web of Science ®Google Scholar
• Kumar PA, Pandey S, Mishra R, et al. Characterization of stainless steel 316 l coated by thermal spray coating. Int J Adv Res Ideas Innov Technol. 2016;2(3):1–7.
   Google Scholar
• Zhang S, Sun D, Bui XL. Nanocomposite thin films and coatings processing, properties and performance. London: Imperial College Press; 2002; Chapter 1, Magnetron sputtered hard and yet tough nanocomposite coatings with case studies: nanocrystalline TiN embedded in amorphous SiNx; p. 1–110.
   Google Scholar