Coupled mechanism and pull-in instability of several probe-membrane assemblies subjected to electrostatic force

ABSTRACT

The mathematical model of a coupled probe-membrane system subjected to electrostatic force is constructed. It is different than the conventional nano/micro actuator, which is constructed by two independent fixed/mobile conducting electrodes. The formula of pull-in voltage for different membranes is presented. The effects of several parameters on the pull-in instability are studied. The analytical method for the coupled vibration is proposed. The effects of the probe tips and several differential boundary conditions of membranes on the coupled characteristics are investigated. The coupled characteristic mechanism is clearly described.

KEYWORDS:

• Probe-membrane model
• electrostatic force
• pull-in instability
• analytical solution
• coupled mechanism

Funding

The support of the Ministry of Science and Technology of Taiwan, R. O. C., is gratefully acknowledged (grant number MOST 104-2221-E-168-023).