References
- S.M. Lin, Nonlinear vibration of the double-beams assembly subjected to a.c. electrostatic force, CMES Comput. Model. Eng. Sci., vol. 60, no. 1, pp. 95–114, 2010.
- A. Szwajca, J. Wei, M.I. Schukfeh, and M. Tornow, Self-assembled monolayers of alkyl-thiols on InAs: A kelvin probe force microscopy study, Surface Sci., vol. 633, pp. 53–59, 2015.
- Y. Zhang and Y.P. Zhao, Numerical and analytical study on the pull-in instability of micro-structure under electrostatic loading, Sensors Actuators A, vol. 127, pp. 366–380, 2006.
- W.M. Zhang, H. Yan, Z.K. Peng, and G. Meng, Electrostatic pull-in instability in MEMS/NEMS: A review, Sensors Actuators A: Phys, vol. 214, no. 1, pp. 187–218, 2014.
- S.M. Lin, C.T. Liauh, S.Y. Lee, S.H. Ho, and W.R. Wang, Frequency shifts and analytical solution of an AFM curved beam, Measurement, vol. 47, pp. 296–305, 2014.
- W.H. Lin and Y.P. Zhao, Pull-in instability of micro-switch actuators: Model review, Int. J. Nonlinear Sci. Numer. Simul., vol. 9, no. 2, pp. 175–183, 2008.
- A.H. Nayfeh, M.I. Younis, and E.M. Abdel-Rahman, Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dyn., vol. 48, pp. 153–163, 2007.
- J.W. Kang, O.K. Kwon, J.H. Lee, Y.G. Choi, and H.J. Hwang, Frequency change by inter-walled length difference of double-wall carbon nanotube resonator, Solid State Commun., vol. 149, pp. 1574–1577, 2009.
- J. Park, S. Lee, K. Jang, and S. Na, Ultra-sensitive direct detection of silver ions via kelvin probe force microscopy, Biosens. Bioelectron., vol. 60, pp. 299–304, 2014.
- K.B. Lee, Design methodology for variable capacitors, J. Micromech. Microeng., vol. 18, p. 025016, 2008.
- X. Zhao, Modeling and Simulation of MEMS Devices, Xiaopeng Zhao, Blacksburg, VA, 2004.
- W.C. Chuang, H.L. Lee, P.Z. Chang, and Y.C. Hu, Review on the modeling of electrostatic MEMS, Sensors, vol. 10, pp. 6149–6171, 2010.
- L.Z. Xu and X.R. Fu, Electromechanical coupled forced responses for microplate, Adv. Mech. Eng., vol. 6, p. 857015, 2014.
- J.X. Gao and L. Cheng, Modeling and control of power flow in a double beam system, Thin-Walled Struct., vol. 43, pp. 751–771, 2005.
- M. Zamanian and A. Karimiyan, Analysis of the mechanical behavior of a doubled microbeam configuration under electrostatic actuation, Int. J. Mech. Sci., vol. 93, pp. 82–92, 2015.
- H. Mobki, M.H. Sadeghi, and G. Rezazadeh, Application of Thau observer for fault detection of micro parallel plate capacitor subjected to nonlinear electrostatic force, Int. J. Eng., vol. 28, no. 2, pp. 270–276, 2015.
- S.M. Lin and M.J. Teng, The analysis and model formulation of a coupled micro-probe and elastic thin plate subjected to electrostatic force, Int. J. Mech. Sci., vol. 103, pp. 224–234, 2015.
- S.M. Lin, Analytical solutions of the frequency shifts of several modes in dynamic force microscopy subjected to AC electrostatic force, IEEE Trans. Nanotechnology, vol. 6, Issue 4, pp. 404–412, 2007.
- T. Glatzel, S. Sadewasser, and M.C. Lux-Steiner, Amplitude or frequency modulation-detection in kelvin probe force microscopy, Appl. Surface Sci., vol. 210, pp. 84–89, 2003.
- S. Hudlet, M.S. Jean, C. Guthmann, and J. Berger, Evaluation of the capacitive force between an atomic-force microscopy tip and a metallic surface, Eur. Phys. Rev. B, vol. 2, pp. 5–10, 1998.
- B.M. Law and F. Rietord, Electrostatic forces in atomic force microscopy, Phys. Rev. B, vol. 66, p. 035402, 2002.
- R. Szilard, Theory and Analysis of Plates: Classical and Numerical Methods, Prentice-Hall, Inc., Englewood Cliffs, NJ, 1974.
- S.M. Lin and C.C. Lin, Phase shifts and energy dissipations of several modes of AFM: Minimizing topography and dissipation measurement errors, Precis. Eng., vol. 33, pp. 371–377, 2009.
- R. Garcia and R. Perez, Dynamic atomic force microscopy method, Surface Sci. Rep., vol. 47, pp. 197–301, 2002.