Preparing molybdenum disulphide by vapour deposition

Abstract

Two-dimensional graphene-like molybdenum disulphide with many unique properties, a relatively new and exciting transition metal dichalcogenide, has been extensively researched. This review discusses preparing molybdenum disulphide by vapour deposition, which has many advantages, including good spreadability, film uniformity and strong bonding forces with the substrate. We also review the compositing, decorating and doping of MoS₂ by vapour deposition, and briefly discuss the applications of MoS₂ produced by vapour deposition.

Keywords:

• MoS₂
• Preparation
• Chemical vapour deposition
• Physical vapour deposition

Acknowledgement

This work is supported by the National Natural Science Foundation of China (grant nos. 61076039, 61204065, 61205193, 61307045, 61404009 and 61474010), Research Fund for the Doctoral Program of Higher Education of China (grant no. 20112216120005), the Developing Project of Science and Technology of Jilin Province (grant nos. 20121816, 201201116, 20140520107JH and 20140204025GX), National Key Laboratory of High Power Semiconductor Lasers Foundation (grant no. 9140C310101120C031115).