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Ferroelectrics Volume 157, 1994 - Issue 1
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Thin film ferroelectrics: Applications

PZT films by the mod technology for non-volatile memory and dram applications

W. Zhu Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, 2263, Singapore, Republic of Singapore
,
R. W. Vest School of Materials Engineering, Purdue University, West Lafayette, IN, 47907, USA
&
M. S. Tse Microelectronics Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, 2263, Singapore, Republic of Singapore
Pages 393-398 | Received 09 Aug 1993, Published online: 26 Oct 2011

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