Formation mechanisms and structures of insulating compounds formed in silicon by ion beam synthesis

K. J. Reeson Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, U.K.; Radiation Effects in Insulators—3, University of Surrey, Guildford

P. L. F. Hemment Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, U.K.; Radiation Effects in Insulators—3, University of Surrey, Guildford

R. F. Peart Department of Electronic and Electrical Engineering, University of Surrey, Guildford, Surrey, GU2 5XH, U.K.; Radiation Effects in Insulators—3, University of Surrey, Guildford

C. D. Meekison Department of Metallurgy and Science of Materials, University of Oxford; Radiation Effects in Insulators—3, University of Surrey, Guildford

C. Marsh Department of Metallurgy and Science of Materials, University of Oxford; Radiation Effects in Insulators—3, University of Surrey, Guildford

G. R. Booker Department of Metallurgy and Science of Materials, University of Oxford; Radiation Effects in Insulators—3, University of Surrey, Guildford

R. J. Chater Department of Metallurgy and Materials Science, Imperial College; Radiation Effects in Insulators—3, University of Surrey, Guildford

J. A. Iulner Department of Metallurgy and Materials Science, Imperial College; Radiation Effects in Insulators—3, University of Surrey, Guildford

J. Davis B.T.R.L., Martlesham Heath; Radiation Effects in Insulators—3, University of Surrey, Guildford

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Formation mechanisms and structures of insulating compounds formed in silicon by ion beam synthesis

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Formation mechanisms and structures of insulating compounds formed in silicon by ion beam synthesis

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