Advanced search
Publication Cover
Integrated Ferroelectrics
An International Journal
Volume 52, 2003 - Issue 1
Submit an article Journal homepage
35
Views
4
CrossRef citations to date
0
Altmetric
Original Articles

Low-Temperature Fabrication of Epitaxial and Random-Oriented Pb(Zr,Ti)O3 Capacitors with SrRuO3 Electrodes on Si Wafers

K. Maki Department of Materials and Nuclear Engineering and Center for Superconductivity Research, University of Maryland, College Park, Maryland 20742; Mitsubishi Materials Corporation, Technopark, Sanda, Hyogo 669-1339, Japan
,
B. T. Liu Department of Materials and Nuclear Engineering and Center for Superconductivity Research, University of Maryland, College Park, Maryland 20742
,
Y. So Department of Materials and Nuclear Engineering and Center for Superconductivity Research, University of Maryland, College Park, Maryland 20742
,
H. Vu Department of Materials and Nuclear Engineering and Center for Superconductivity Research, University of Maryland, College Park, Maryland 20742
,
R. Ramesh Department of Materials and Nuclear Engineering and Center for Superconductivity Research, University of Maryland, College Park, Maryland 20742
,
J. Finder Physical Sciences Research Laboratories, Motorola Laboratories, Tempe, Arizona 85284
,
Z. Yu Physical Sciences Research Laboratories, Motorola Laboratories, Tempe, Arizona 85284
,
R. Droopad Physical Sciences Research Laboratories, Motorola Laboratories, Tempe, Arizona 85284
&
K. Eisenbeiser Physical Sciences Research Laboratories, Motorola Laboratories, Tempe, Arizona 85284
 show all
Pages 19-31 | Published online: 07 Jul 2010

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.