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Integrated Ferroelectrics
An International Journal
Volume 67, 2004 - Issue 1
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Original Articles

Characteristics of Pb(Zr, Ti)O3 Thin Films Deposited on Pt(Si) at Low Substrate Temperature by Using Ba(Mg1/3Ta2/3)O3 as Buffer Layer

YING-HAO CHU Department of Materials Science & Engineering, National Tsing Hua University, Hsin Chu, Taiwan, R.O.C.
,
SU-JIEN LIN Department of Materials Science & Engineering, National Tsing Hua University, Hsin Chu, Taiwan, R.O.C.
,
KUO-SHUNG LIU Department of Materials Science & Engineering, National Tsing Hua University, Hsin Chu, Taiwan, R.O.C.
&
I-NAN LIN Materials Science Center, National Tsing Hua University, Hsin Chu, Taiwan
Pages 3-12 | Received 01 Apr 2004, Accepted 01 Aug 2004, Published online: 12 Aug 2010

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