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Integrated Ferroelectrics
An International Journal
Volume 89, 2007 - Issue 1
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SECTION J: DEVICE PROCESS INTEGRATION/RELIABILITY (FERRO-, PIEZO-, PYRO-ELECTRICS)

A NOVEL ATE (ADDITIONAL TOP-ELECTRODE) SCHEME FOR A 1.6 V FRAM EMBEDDED DEVICE AT 180 NM TECHNOLOGY

HEUNG JIN JOO Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
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SEUNG KUK KANG Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
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JUNG HOON PARK Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
HWI SAN KIM Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
JAI-HYUN KIM Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
JU YOUNG JUNG Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
DO YEON CHOI Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
EUN SUN LEE Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
YOUNG MIN KANG Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
SUNG YUNG LEE Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
,
HONG SIK JEONG Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
&
KINAM KIM Advanced Technology Development Team, Semiconductor R&D Division, Samsung Electronics Co., San #24, Nongseo-Dong, Kiheung-Gu, Yongin-City, Kyunggi-Do, Korea
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Pages 106-115 | Received 31 May 2006, Published online: 12 Oct 2011

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