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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Materials processing—CVD

Manufacturing of perovskite thin films using liquid delivery MOCVD

P. C. Van Buskirk Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
,
J. F. Roeder Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
&
S. Bilodeau Advanced Technology Materials, Inc., Danbury, CT, 06810, USA
Pages 9-22 | Received 18 Apr 1995, Published online: 19 Aug 2006

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